High-contrast photoluminescent patterns in lithium fluoride crystals produced by soft x-rays from a laser-plasma source

ABSTRACTA laser-generated plasma source of monochromatized soft x-rays has been used to study the x-ray lithographic resist properties of poly(cyclohexylmethylsilane-co-dimethylsilane). X-ray absorption spectra near the SiL2,3 edge of unexposed samples were measured to guide the choice of exposure photon energy. We find that poly(cyclohexyl-methylsilane-co-dimethylsilane) exhibits positive tone at x-ray energies near 105 eV (Si 2p resonance), a sensitivity of 1000 mJ/cm2 and a contrast of 1.5. Sensitivity is found to increase markedly when exposed samples are held in air before development. Using simple wire mesh masks, estimates of the minimum achievable linewidth have been made.

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Broadband Multilayers: Tailor Made Mirrors for Linearly Polarized X-rays from a Laser Plasma Source

Short Wavelength Laboratory Sources ◽

10.1039/9781849735018-00326 ◽

2014 ◽

pp. 326-332

Author(s):

M. Krämer ◽

K. Mann

Keyword(s):

Laser Plasma ◽

Plasma Source ◽

X Rays ◽

Linearly Polarized

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Advances in microscopic imaging at the nanoscale using soft X-rays and extreme ultraviolet (EUV) from a compact laser plasma source

Advances in Microscopic Imaging II ◽

10.1117/12.2526737 ◽

2019 ◽

Author(s):

Przemyslaw Wachulak ◽

Andrzej Bartnik ◽

Henryk Fiedorowicz

Keyword(s):

Laser Plasma ◽

Extreme Ultraviolet ◽

Plasma Source ◽

X Rays ◽

Microscopic Imaging

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Nanoscale Imaging Using a Compact Laser Plasma Source of Soft X-Rays and Extreme Ultraviolet (EUV)

Springer Proceedings in Physics - X-Ray Lasers 2016 ◽

10.1007/978-3-319-73025-7_37 ◽

2018 ◽

pp. 251-260 ◽

Cited By ~ 1

Author(s):

P. Wachulak ◽

A. Torrisi ◽

M. Ayele ◽

J. Czwartos ◽

A. Bartnik ◽

...

Keyword(s):

Laser Plasma ◽

Extreme Ultraviolet ◽

Plasma Source ◽

X Rays ◽

Nanoscale Imaging

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Lithium fluoride coloration by laser-plasma soft x-rays: a promising tool for x-ray microscopy and photonics

10.1117/12.505782 ◽

2004 ◽

Cited By ~ 3

Author(s):

Francesco Flora ◽

Giuseppe Baldacchini ◽

Francesca Bonfigli ◽

Antonella Lai ◽

Tiziana Marolo ◽

...

Keyword(s):

Laser Plasma ◽

Lithium Fluoride ◽

X Rays ◽

X Ray ◽

Promising Tool

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An ensemble of new techniques to study soft-X-ray-induced variations in cellular metabolism

Laser and Particle Beams ◽

10.1017/s0263034604223175 ◽

2004 ◽

Vol 22 (3) ◽

pp. 323-333 ◽

Cited By ~ 2

Author(s):

EDMOND TURCU ◽

RICK ALLOT ◽

NICOLA LISI ◽

DIMITRI BATANI ◽

FULVIA BORTOLOTTO ◽

...

Keyword(s):

Laser Plasma ◽

Metabolic Response ◽

Cell Metabolism ◽

Plasma Source ◽

Yeast Cells ◽

X Rays ◽

New Techniques ◽

X Ray ◽

Cell Compartments ◽

High Doses

An ensemble of new techniques has been developed to study cell metabolism. These include: CO2production monitoring, cell irradiation with soft X rays produced with a laser-plasma source, and study of oscillations in cell metabolic activity via spectral analysis of experimental records. Soft X-rays at about 0.9 keV, with a very low penetration in biological material, were chosen to produce damages at the metabolic level, without great interference with DNA activity. The use of a laser-plasma source allowed a fast deposition of high doses. Monitoring of CO2production allowed us to measure cell metabolic response immediately after irradiation in a continuous and noninvasive way. Also a simple model was developed to calculate X-ray doses delivered to the different cell compartments following a Lambert–Bouguet–Beer law. Results obtained onSaccharomyces cerevisiaeyeast cells in experiments performed at Rutherford Appleton Laboratory are presented.

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