The influence of substrate temperature and Al mobility on the microstructural evolution of magnetron sputtered ternary Ti–Al–N thin films
2007 ◽
Vol 307
(2)
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pp. 278-282
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1987 ◽
Vol 30
(3)
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pp. 327-331
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2021 ◽
Vol 10
(8)
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pp. 084008
2020 ◽
Vol 02
(01)
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pp. 01-15
Keyword(s):
Keyword(s):
2015 ◽
Vol 88
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pp. 600-608
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