Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model

2009 ◽  
Vol 106 (6) ◽  
pp. 063307 ◽  
Author(s):  
J. Schulze ◽  
E. Schüngel ◽  
U. Czarnetzki ◽  
Z. Donkó
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Radio Frequency Discharges

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

Disparity between current and voltage driven capacitively coupled radio frequency discharges

2018 ◽  
Vol 27 (12) ◽  
pp. 125010 ◽  
Author(s):  
S Wilczek ◽  
J Trieschmann ◽  
J Schulze ◽  
Z Donkó ◽  
R P Brinkmann ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharges
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