asymmetry effect
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A Study of Overlay Accuracy Improvement on Process Induced Asymmetry Effect

2021 ◽  
Author(s):  
Yuyang Bian ◽  
Xijun Guan ◽  
Biqiu Liu ◽  
Xiaobo Guo ◽  
Cong Zhang ◽  
...  
Keyword(s):  
Accuracy Improvement ◽  
Asymmetry Effect

Effects of magnetic field on the secondary electron asymmetry effect in capacitively coupled plasmas

2021 ◽  
Vol 28 (12) ◽  
pp. 123505
Author(s):  
Shali Yang ◽  
Tianxiang Zhang ◽  
Hanlei Lin ◽  
Hao Wu ◽  
Qiang Zhang
Keyword(s):  
Magnetic Field ◽  
Secondary Electron ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Coupled Plasmas

Numerical investigation into the time-asymmetry effect on a plunging foil

2021 ◽  
Vol 225 ◽  
pp. 108833
Author(s):  
Xiao Chen ◽  
Qiaogao Huang ◽  
Guang Pan ◽  
Yao Shi
Keyword(s):  
Numerical Investigation ◽  
Time Asymmetry ◽  
Asymmetry Effect

scholarly journals Suppression of nonlinear standing wave excitation via the electrical asymmetry effect

2020 ◽  
Vol 29 (12) ◽  
pp. 124001
Author(s):  
Kai Zhao ◽  
Zi-Xuan Su ◽  
Jia-Rui Liu ◽  
Yong-Xin Liu ◽  
Yu-Ru Zhang ◽  
...  
Keyword(s):  
Standing Wave ◽  
Wave Excitation ◽  
Asymmetry Effect ◽  
Nonlinear Standing Wave

Electrical asymmetry effect in inhomogeneously magnetized capacitively coupled plasmas

2020 ◽  
Vol 29 (11) ◽  
pp. 114002
Author(s):  
Jing-Yu Sun ◽  
Quan-Zhi Zhang ◽  
Jia-Rui Liu ◽  
Yuan-Hong Song ◽  
You-Nian Wang
Keyword(s):  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Coupled Plasmas

scholarly journals Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering

2019 ◽  
Vol 28 (11) ◽  
pp. 114001 ◽  
Author(s):  
Stefan Ries ◽  
Lars Banko ◽  
Marcus Hans ◽  
Daniel Primetzhofer ◽  
Jochen M Schneider ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Coating Properties ◽  
Energy Control ◽  
Ion Energy ◽  
Asymmetry Effect ◽  
Radio Frequency Sputtering
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