Different modes of electron heating in dual-frequency capacitively coupled radio frequency discharges
2009 ◽
Vol 18
(3)
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pp. 034011
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2007 ◽
Vol 40
(22)
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pp. 7008-7018
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2018 ◽
Vol 27
(12)
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pp. 125010
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2020 ◽
Vol 29
(8)
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pp. 085019
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2008 ◽
Vol 41
(22)
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pp. 225208
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2011 ◽
Vol 50
(3R)
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pp. 036001
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