Hydrogenated amorphous silicon position sensitive detector

1985 ◽  
Vol 57 (10) ◽  
pp. 4778-4782 ◽  
Author(s):  
Satoshi Arimoto ◽  
Hidekazu Yamamoto ◽  
Hideo Ohno ◽  
Hideki Hasegawa
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Position Sensitive ◽  
Hydrogenated Amorphous

Large Area Position Sensitive Detector Based on Amorphous Silicon Technology

1993 ◽  
Vol 297 ◽  
Author(s):  
E. Fortunato ◽  
M. Vieira ◽  
L. Ferreira ◽  
C.N. Carvalho ◽  
G. Lavareda ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Chemical Vapor ◽  
Position Sensitive Detector ◽  
Back Side ◽  
Sensitive Detector ◽  
Metal Contacts ◽  
Key Factors ◽  
Large Area ◽  
Position Sensitive

We have developed a rectangular dual-axis large area Position Sensitive Detector (PSD), with 5 cm × 5 cm detection area, based on PIN hydrogenated amorphous silicon (a-Si:H) technology, produced by Plasma Enhanced Chemical Vapor Deposition (PECVD). The metal contacts are located in the four edges of the detected area, two of them located on the back side of the ITO/PIN/A1 structure and the others two located in the front side. The key factors of the detectors resolution and linearity are the thickness uniformity of the different layers, the geometry and the contacts location. Besides that, edge effects on the sensor's corner disturb the linearity of the detector. In this paper we present results concerning the linearity of the detector as well as its optoelectronic characteristics and the role of the i-layer thickness on the final sensor performances.

Performances presented by a position-sensitive detector based on amorphous silicon technology

1993 ◽  
Author(s):  
Elvira Fortunato ◽  
Manuela Vieira ◽  
Carlos N. Carvalho ◽  
Guilherme Lavareda ◽  
Rodrigo Martins ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Silicon Technology ◽  
Position Sensitive

A New Linear Array Thin Film Position Sensitive Detector (LTFPSD) for 3D Measurements

1995 ◽  
Vol 377 ◽  
Author(s):  
E. Fortunato ◽  
F. Soares ◽  
G. Lavareda ◽  
R. Martins
Keyword(s):  
Thin Film ◽  
Linear Array ◽  
Low Complexity ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Optical Inspection ◽  
Position Sensitive ◽  
First Time ◽  
Hydrogenated Amorphous ◽  
Cross Section Method

ABSTRACTA Linear array Thin Film Position Sensitive Detector (LTFPSD) based on hydrogenated amorphous silicon (a-Si:H) is proposed for the first time, taking advantage of the optical properties presented by a-Si:H devices we have developed a LTFPSD with 128 integrated elements able to be used in 3D inspections/measurements. Each element consists on an one-dimensional TFPSD, based on a p.i.n diode produced in a conventional PECVD system, where the doped layers are coated with thin resistive layers to establish the required device equipotentials. By proper incorporation of the LTFPSD into an optical inspection camera it will be possible to acquire information about an object/surface, through the optical cross-section method1. The main advantages of this system, when compared with the conventional CCDs, are the low complexity of hardware and software used and that the information can be continuously processed (analogue detection).

New ultra-light flexible large area thin film position sensitive detector based on amorphous silicon

2000 ◽  
Vol 266-269 ◽  
pp. 1213-1217 ◽  
Author(s):  
E. Fortunato ◽  
I. Ferreira ◽  
F. Giuliani ◽  
P. Wurmsdobler ◽  
R. Martins
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Large Area ◽  
Position Sensitive

Thin film position sensitive detector based on amorphous silicon p–i–n diode

1994 ◽  
Vol 65 (12) ◽  
pp. 3784-3786 ◽  
Author(s):  
Elvira Fortunato ◽  
Guilherme Lavareda ◽  
Manuela Vieira ◽  
Rodrigo Martins
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Position Sensitive

Position‐sensitive photodetector based on hydrogenated amorphous silicon p‐i‐n junctions

1987 ◽  
Vol 58 (2) ◽  
pp. 202-206 ◽  
Author(s):  
V. A. Chumak ◽  
M. Bertolotti ◽  
A. Ferrari ◽  
F. Bartoloni ◽  
F. Evangelisti
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Position Sensitive ◽  
Hydrogenated Amorphous

Color sensing ability of an amorphous silicon position sensitive detector array system

2014 ◽  
Vol 205 ◽  
pp. 26-37 ◽  
Author(s):  
Javier Contreras ◽  
Rodrigo Martins ◽  
Pawel Wojcik ◽  
Sergej Filonovich ◽  
Hugo Aguas ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Position Sensitive Detector ◽  
Detector Array ◽  
Sensitive Detector ◽  
Position Sensitive

Application of Amorphous Silicon Thin-Film Position-Sensitive Detector to Optical Rules

2001 ◽  
Vol 3 (3) ◽  
pp. 174-177 ◽  
Author(s):  
R. Martins ◽  
P. Teodoro ◽  
F. Soares ◽  
I. Ferreira ◽  
N. Guimarães ◽  
...  
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Silicon Thin Film ◽  
Position Sensitive

Amorphous Silicon Position Sensitive Detector Array for Fast 3-D Object Profiling

2012 ◽  
Vol 12 (4) ◽  
pp. 812-820 ◽  
Author(s):  
Javier Contreras ◽  
Marek Idzikowski ◽  
Sónia Pereira ◽  
Sergej A. Filonovich ◽  
Elvira Fortunato ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Position Sensitive Detector ◽  
Detector Array ◽  
Sensitive Detector ◽  
Position Sensitive
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