Electrical conduction mechanism and breakdown property in sputter‐deposited silicon dioxide films on polycrystalline silicon
Keyword(s):
1988 ◽
Vol 135
(12)
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pp. 3104-3106
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Keyword(s):
Keyword(s):
2002 ◽
Vol 41
(Part 1, No. 11B)
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pp. 7053-7056
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