Measurements in silane radio frequency glow discharges using a tuned and heated Langmuir probe

1993 ◽  
Vol 74 (8) ◽  
pp. 4899-4902 ◽  
Author(s):  
Quixun Lin ◽  
Xuangying Lin ◽  
Yunpeng Yu ◽  
Hong Wang ◽  
Jiayi Chen
1987 ◽  
Vol 50 (9) ◽  
pp. 492-494 ◽  
Author(s):  
Albert D. Richards ◽  
Brian E. Thompson ◽  
Herbert H. Sawin

2009 ◽  
Vol 16 (7) ◽  
pp. 070702 ◽  
Author(s):  
Jianjun Shi ◽  
Yeqing Cai ◽  
Jie Zhang ◽  
Ke Ding ◽  
Jing Zhang

2007 ◽  
Vol 90 (4) ◽  
pp. 041502 ◽  
Author(s):  
D. W. Liu ◽  
J. J. Shi ◽  
M. G. Kong

2007 ◽  
Vol 247 (1) ◽  
pp. 295-302 ◽  
Author(s):  
L. Laguardia ◽  
D. Ricci ◽  
E. Vassallo ◽  
A. Cremona ◽  
E. Mesto ◽  
...  

2007 ◽  
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Author(s):  
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Vacuum ◽  
1997 ◽  
Vol 48 (7-9) ◽  
pp. 665-668 ◽  
Author(s):  
G Viera ◽  
SN Sharma ◽  
J Costa ◽  
RQ Zhang ◽  
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...  

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