Study on the Analytical Solution of Electron Number Density and Impedance of α Mode Helium Radio-Frequency Atmospheric Pressure Glow Discharges

Author(s):  
Wang Hao ◽  
Jiao Junkai ◽  
Luo Haiyun ◽  
Wang Xinxin
Author(s):  
Jinmei Wang ◽  
Shiyu Li ◽  
Peichao Zheng ◽  
Yanying Chen

A novel plasma source of pulsed electrolyte cathode atmospheric pressure discharge (pulsed-ECAD) driven by an alternating current (AC) power supply coupled with a high voltage diode was generated, and the discharge was generated in the open-to-air atmosphere between a metal electrode and a small-sized flowing liquid cathode. The spatial distribution of plasma temperatures (excitation, vibrational and rotational) of the pulsed-ECAD were investigated. The electron excitation temperature of H Texc(H), vibrational temperature of N2 Tvib(N2), and rotational temperature of OH Trot(OH) were measured as 4900±36-6800±108 K, 4600±86-5800±100 K and 1050±20-1140±10 K, respectively. Meanwhile, the temperature characteristics of dc solution cathode glow discharge (dc-SCGD) were also studied for comparison with pulsed-ECAD. The effects of operating parameters, including discharge voltage and discharge frequency, on the plasma temperatures were investigated. The electron number density determined in the discharge system and dc-SCGD were within the range (3.8–18.9) ×1014 cm-3 and 2.6×1014-17.2×1014 cm-3, respectively.


2020 ◽  
Vol 29 (2) ◽  
pp. 025017 ◽  
Author(s):  
Florent P Sainct ◽  
Keiichiro Urabe ◽  
Erwan Pannier ◽  
Deanna A Lacoste ◽  
Christophe O Laux

2014 ◽  
Vol 2014 ◽  
pp. 1-8 ◽  
Author(s):  
M. Y. Naz ◽  
S. Shukrullah ◽  
A. Ghaffar ◽  
N. U. Rehman

Multitip probes are very useful diagnostics for analyzing and controlling the physical phenomena occurring in low temperature discharge plasmas. However, DC biased probes often fail to perform well in processing plasmas. The objective of the work was to deduce simple designs of DC biased multitip probes for parametric study of radio frequency plasmas. For this purpose, symmetric double probe, asymmetric double probe, and symmetric triple probe diagnostic systems and their driving circuits were designed and tested in an inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. UsingI-Vcharacteristics of these probes, electron temperature, electron number density, and ion saturation current was measured as a function of input power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density for increasing input RF power whilst a decreasing trend was evident in these parameters when measured against filling gas pressure. In addition, the electron energy probability function (EEPF) was also studied by using an asymmetric double probe. These studies confirmed the non-Maxwellian nature of the EEPF and the presence of two groups of the energetic electrons at low filling gas pressures.


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