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Suppression of Divergence of Low Energy Ion Beams by Space Charge Neutralization with Low Energy Electrons Emitted from Field Emitter Arrays
Mapping Intimacies
◽
10.1063/1.3548461
◽
2011
◽
Cited By ~ 1
Author(s):
Junzo Ishikawa
◽
Yasuhito Gotoh
◽
Mitsuaki Takeuchi
◽
Shuhei Taguchi
◽
Dan Nicolaescu
◽
...
Keyword(s):
Space Charge
◽
Ion Beams
◽
Low Energy
◽
Field Emitter
◽
Charge Neutralization
◽
Field Emitter Arrays
◽
Low Energy Electrons
Download Full-text
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Neutralization of space charge on high-current low-energy ion beam by low-energy electrons supplied from silicon based field emitter arrays
10.1063/1.4766565
◽
2012
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Cited By ~ 5
Author(s):
Yasuhito Gotoh
◽
Hiroshi Tsuji
◽
Shuhei Taguchi
◽
Keita Ikeda
◽
Takayuki Kitagawa
◽
...
Keyword(s):
Space Charge
◽
Ion Beam
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Low Energy
◽
High Current
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Field Emitter Arrays
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◽
Silicon Based
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Formation of low energy electron beam with silicon field emitter arrays for space charge compensation in low-energy ion-implantation system
2009 22nd International Vacuum Nanoelectronics Conference
◽
10.1109/ivnc.2009.5271586
◽
2009
◽
Author(s):
Shuhei Taguchi
◽
Mitsuaki Takeuchi
◽
Yasuhito Gotoh
◽
Hiroshi Tsuji
◽
Junzo Ishikawa
◽
...
Keyword(s):
Electron Beam
◽
Ion Implantation
◽
Space Charge
◽
Charge Compensation
◽
Low Energy
◽
Energy Electron
◽
Field Emitter
◽
Field Emitter Arrays
◽
Low Energy Electron
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Application of silicon field emitter arrays for space-charge compensation of low energy ion beam
2009 22nd International Vacuum Nanoelectronics Conference
◽
10.1109/ivnc.2009.5271847
◽
2009
◽
Cited By ~ 1
Author(s):
M. Takeuchi
◽
S. Taguchi
◽
Y. Gotoh
◽
H. Suji
◽
J. Ishikawa
◽
...
Keyword(s):
Space Charge
◽
Ion Beam
◽
Charge Compensation
◽
Low Energy
◽
Field Emitter
◽
Field Emitter Arrays
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Production of extremely low energy electron beam with silicon-based field emitter arrays and its application to space charge neutralization of low-energy and high-current ion beam
25th International Vacuum Nanoelectronics Conference
◽
10.1109/ivnc.2012.6316868
◽
2012
◽
Author(s):
Yasuhito Gotoh
◽
Shuhei Taguchi
◽
Keita Ikeda
◽
Takayuki Kitagawa
◽
Hiroshi Tsuji
◽
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Keyword(s):
Electron Beam
◽
Space Charge
◽
Ion Beam
◽
Low Energy
◽
Energy Electron
◽
High Current
◽
Field Emitter
◽
Field Emitter Arrays
◽
Low Energy Electron
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Silicon Based
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Transport of intense ion beams and space charge compensation issues in low energy beam lines (invited)
Review of Scientific Instruments
◽
10.1063/1.3678658
◽
2012
◽
Vol 83
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◽
pp. 02B320
◽
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Author(s):
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◽
O. Delferrière
◽
R. Duperrier
◽
R. Gobin
◽
P. A. P. Nghiem
◽
...
Keyword(s):
Space Charge
◽
Charge Compensation
◽
Ion Beams
◽
Low Energy
◽
Energy Beam
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Space-charge neutralization in low-energy beam lines
Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment
◽
10.1016/0168-9002(89)91169-8
◽
1989
◽
Vol 278
(1)
◽
pp. 224-227
◽
Cited By ~ 1
Author(s):
T. Weis
◽
R. Dölling
◽
P. Gross
◽
H. Klein
◽
J. Wiegand
Keyword(s):
Space Charge
◽
Low Energy
◽
Charge Neutralization
◽
Energy Beam
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Neutralization of Space Charge Effects for Low Energy Ion Beams Using Field Emitters
10.1063/1.3033609
◽
2008
◽
Cited By ~ 3
Author(s):
D. Nicolaescu
◽
S. Sakai
◽
K. Matsuda
◽
Y. Gotoh
◽
J. Ishikawa
◽
...
Keyword(s):
Space Charge
◽
Ion Beams
◽
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◽
Space Charge Effects
◽
Charge Effects
◽
Field Emitters
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Space charge effects on the current-voltage characteristics of gated field emitter arrays
Journal of Applied Physics
◽
10.1063/1.365783
◽
1997
◽
Vol 82
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◽
pp. 845-854
◽
Cited By ~ 37
Author(s):
K. L. Jensen
◽
M. A. Kodis
◽
R. A. Murphy
◽
E. G. Zaidman
Keyword(s):
Space Charge
◽
Space Charge Effects
◽
Charge Effects
◽
Field Emitter
◽
Field Emitter Arrays
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Current Voltage
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Current Voltage Characteristics
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Low‐energy ion beam space‐charge neutralization
Review of Scientific Instruments
◽
10.1063/1.1144941
◽
1994
◽
Vol 65
(4)
◽
pp. 1451-1453
◽
Cited By ~ 13
Author(s):
S. V. Dudin
◽
A. V. Zykov
◽
V. I. Farenik
Keyword(s):
Space Charge
◽
Ion Beam
◽
Low Energy
◽
Charge Neutralization
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Effects of space charge on the current-voltage characteristics of field emitter arrays
10.1063/1.52373
◽
1997
◽
Cited By ~ 1
Author(s):
K. L. Jensen
◽
E. G. Zaidman
◽
M. A. Kodis
Keyword(s):
Space Charge
◽
Field Emitter
◽
Field Emitter Arrays
◽
Current Voltage
◽
Current Voltage Characteristics
Download Full-text
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