Formation of low energy electron beam with silicon field emitter arrays for space charge compensation in low-energy ion-implantation system

Author(s):  
Shuhei Taguchi ◽  
Mitsuaki Takeuchi ◽  
Yasuhito Gotoh ◽  
Hiroshi Tsuji ◽  
Junzo Ishikawa ◽  
...  
2021 ◽  
Vol 640 (3) ◽  
pp. 032006
Author(s):  
U A Bliznyuk ◽  
P Yu Borchegovskaya ◽  
A P Chernyaev ◽  
V S Ipatova ◽  
V A Leontiev ◽  
...  

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