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Application of silicon field emitter arrays for space-charge compensation of low energy ion beam
2009 22nd International Vacuum Nanoelectronics Conference
◽
10.1109/ivnc.2009.5271847
◽
2009
◽
Cited By ~ 1
Author(s):
M. Takeuchi
◽
S. Taguchi
◽
Y. Gotoh
◽
H. Suji
◽
J. Ishikawa
◽
...
Keyword(s):
Space Charge
◽
Ion Beam
◽
Charge Compensation
◽
Low Energy
◽
Field Emitter
◽
Field Emitter Arrays
Download Full-text
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Formation of low energy electron beam with silicon field emitter arrays for space charge compensation in low-energy ion-implantation system
2009 22nd International Vacuum Nanoelectronics Conference
◽
10.1109/ivnc.2009.5271586
◽
2009
◽
Author(s):
Shuhei Taguchi
◽
Mitsuaki Takeuchi
◽
Yasuhito Gotoh
◽
Hiroshi Tsuji
◽
Junzo Ishikawa
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...
Keyword(s):
Electron Beam
◽
Ion Implantation
◽
Space Charge
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◽
Low Energy
◽
Energy Electron
◽
Field Emitter
◽
Field Emitter Arrays
◽
Low Energy Electron
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Neutralization of space charge on high-current low-energy ion beam by low-energy electrons supplied from silicon based field emitter arrays
10.1063/1.4766565
◽
2012
◽
Cited By ~ 5
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Yasuhito Gotoh
◽
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Keita Ikeda
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Keyword(s):
Space Charge
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Ion Beam
◽
Low Energy
◽
High Current
◽
Field Emitter
◽
Field Emitter Arrays
◽
Low Energy Electrons
◽
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Production of extremely low energy electron beam with silicon-based field emitter arrays and its application to space charge neutralization of low-energy and high-current ion beam
25th International Vacuum Nanoelectronics Conference
◽
10.1109/ivnc.2012.6316868
◽
2012
◽
Author(s):
Yasuhito Gotoh
◽
Shuhei Taguchi
◽
Keita Ikeda
◽
Takayuki Kitagawa
◽
Hiroshi Tsuji
◽
...
Keyword(s):
Electron Beam
◽
Space Charge
◽
Ion Beam
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Low Energy
◽
Energy Electron
◽
High Current
◽
Field Emitter
◽
Field Emitter Arrays
◽
Low Energy Electron
◽
Silicon Based
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Metal-free and gasless space charge compensation of low energy ion beam by using surface-carbonized silicon field emitter array
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
◽
10.1116/1.3271159
◽
2010
◽
Vol 28
(2)
◽
pp. C2D5-C2D10
◽
Cited By ~ 2
Author(s):
Mitsuaki Takeuchi
◽
Yasuhito Gotoh
◽
Hiroshi Tsuji
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Junzo Ishikawa
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Keyword(s):
Space Charge
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Ion Beam
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Charge Compensation
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Low Energy
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Field Emitter
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Space charge compensation of low energy ion beam
Review of Scientific Instruments
◽
10.1063/1.1431412
◽
2002
◽
Vol 73
(2)
◽
pp. 995-997
◽
Cited By ~ 1
Author(s):
V. Dudnikov
◽
A. Dudnikov
Keyword(s):
Space Charge
◽
Ion Beam
◽
Charge Compensation
◽
Low Energy
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Development of low energy ion beam system for space charge compensation experiments
Review of Scientific Instruments
◽
10.1063/1.2801549
◽
2008
◽
Vol 79
(2)
◽
pp. 02B712
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Cited By ~ 2
Author(s):
Mitsuaki Takeuchi
◽
Yasuhito Gotoh
◽
Hiroshi Tsuji
◽
Junzo Ishikawa
◽
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Keyword(s):
Space Charge
◽
Ion Beam
◽
Charge Compensation
◽
Low Energy
◽
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Suppression of Divergence of Low Energy Ion Beams by Space Charge Neutralization with Low Energy Electrons Emitted from Field Emitter Arrays
10.1063/1.3548461
◽
2011
◽
Cited By ~ 1
Author(s):
Junzo Ishikawa
◽
Yasuhito Gotoh
◽
Mitsuaki Takeuchi
◽
Shuhei Taguchi
◽
Dan Nicolaescu
◽
...
Keyword(s):
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Ion Beams
◽
Low Energy
◽
Field Emitter
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Charge Neutralization
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Field Emitter Arrays
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Transport of intense ion beams and space charge compensation issues in low energy beam lines (invited)
Review of Scientific Instruments
◽
10.1063/1.3678658
◽
2012
◽
Vol 83
(2)
◽
pp. 02B320
◽
Cited By ~ 20
Author(s):
N. Chauvin
◽
O. Delferrière
◽
R. Duperrier
◽
R. Gobin
◽
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...
Keyword(s):
Space Charge
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Charge Compensation
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Ion Beams
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Simulation of space charge compensation in a multibeamlet negative ion beam
Review of Scientific Instruments
◽
10.1063/1.4933252
◽
2016
◽
Vol 87
(2)
◽
pp. 02B917
◽
Cited By ~ 14
Author(s):
E. Sartori
◽
T. J. Maceina
◽
P. Veltri
◽
M. Cavenago
◽
G. Serianni
Keyword(s):
Space Charge
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Ion Beam
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Charge Compensation
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Negative Ion
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Study on space charge compensation in negative hydrogen ion beam
Review of Scientific Instruments
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10.1063/1.4932557
◽
2016
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Vol 87
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pp. 02B915
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Cited By ~ 1
Author(s):
A. L. Zhang
◽
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Keyword(s):
Space Charge
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Ion Beam
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Charge Compensation
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Hydrogen Ion
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Negative Hydrogen Ion
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