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Topography evolution mechanism on fused silica during low-energy ion beam sputtering
Journal of Applied Physics
◽
10.1063/1.3549170
◽
2011
◽
Vol 109
(4)
◽
pp. 043501-043501-6
◽
Cited By ~ 27
Author(s):
J. Völlner
◽
B. Ziberi
◽
F. Frost
◽
B. Rauschenbach
Keyword(s):
Ion Beam
◽
Fused Silica
◽
Low Energy
◽
Ion Beam Sputtering
◽
Evolution Mechanism
◽
Beam Sputtering
Download Full-text
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Cited By
References
Evolution mechanism of surface roughness during ion beam sputtering of fused silica
Applied Optics
◽
10.1364/ao.57.005566
◽
2018
◽
Vol 57
(20)
◽
pp. 5566
◽
Cited By ~ 5
Author(s):
Mingjin Xu
◽
Yifan Dai
◽
Lin Zhou
◽
Xiaoqiang Peng
◽
Shaoshan Chen
◽
...
Keyword(s):
Surface Roughness
◽
Ion Beam
◽
Fused Silica
◽
Ion Beam Sputtering
◽
Evolution Mechanism
◽
Beam Sputtering
Download Full-text
Nanostructure formation and regulation during low-energy ion beam sputtering of fused silica surfaces
Optical Engineering
◽
10.1117/1.oe.56.12.125102
◽
2017
◽
Vol 56
(12)
◽
pp. 1
Author(s):
Wenlin Liao
◽
Yi-Fan Dai
◽
Xutao Nie
◽
Xuqing Nie
Keyword(s):
Ion Beam
◽
Fused Silica
◽
Low Energy
◽
Ion Beam Sputtering
◽
Nanostructure Formation
◽
Silica Surfaces
◽
Beam Sputtering
Download Full-text
Surface roughness evolution mechanism of the optical aluminum 6061 alloy during low energy Ar+ ion beam sputtering
Optics Express
◽
10.1364/oe.410023
◽
2020
◽
Vol 28
(23)
◽
pp. 34054
Author(s):
Chunyang Du
◽
Yifan Dai
◽
Hao Hu
◽
Chaoliang Guan
Keyword(s):
Surface Roughness
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Sputtering
◽
Evolution Mechanism
◽
Beam Sputtering
◽
Aluminum 6061 Alloy
◽
Surface Roughness Evolution
Download Full-text
Investigation of laser-induced damage threshold improvement mechanism during ion beam sputtering of fused silica
Optics Express
◽
10.1364/oe.25.029260
◽
2017
◽
Vol 25
(23)
◽
pp. 29260
◽
Cited By ~ 8
Author(s):
Mingjin Xu
◽
Feng Shi
◽
Lin Zhou
◽
Yifan Dai
◽
Xiaoqiang Peng
◽
...
Keyword(s):
Ion Beam
◽
Damage Threshold
◽
Fused Silica
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Laser Induced Damage
Download Full-text
Investigation of surface characteristics evolution and laser damage performance of fused silica during ion-beam sputtering
Optical Materials
◽
10.1016/j.optmat.2016.03.034
◽
2016
◽
Vol 58
◽
pp. 151-157
◽
Cited By ~ 9
Author(s):
Mingjin Xu
◽
Yifan Dai
◽
Lin Zhou
◽
Feng Shi
◽
Wen Wan
◽
...
Keyword(s):
Ion Beam
◽
Surface Characteristics
◽
Fused Silica
◽
Laser Damage
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
High fluence effect on Si ripple morphology developed by low energy ion beam sputtering
10.1063/1.4810246
◽
2013
◽
Cited By ~ 4
Author(s):
Debasree Chowdhury
◽
Debabrata Ghose
Keyword(s):
Ion Beam
◽
Low Energy
◽
High Fluence
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
Topographical changes induced by low energy ion beam sputtering at oblique incidence
Radiation Effects
◽
10.1080/00337578308228185
◽
1983
◽
Vol 77
(3-4)
◽
pp. 177-193
◽
Cited By ~ 11
Author(s):
Ren Cong-xin
◽
Chen Guo-Ming
◽
Fu Xtn-Ding
◽
Yang Jie
◽
Fang Hong-Li
◽
...
Keyword(s):
Oblique Incidence
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
Silicon nitride layers on gallium arsenide by low‐energy ion beam sputtering
Journal of Vacuum Science and Technology
◽
10.1116/1.569904
◽
1979
◽
Vol 16
(2)
◽
pp. 189-192
◽
Cited By ~ 10
Author(s):
L. E. Bradley
◽
J. R. Sites
Keyword(s):
Gallium Arsenide
◽
Silicon Nitride
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Nitride Layers
Download Full-text
Optical characterization and laser damage of fused silica optics after ion beam sputtering
Optik
◽
10.1016/j.ijleo.2013.07.039
◽
2014
◽
Vol 125
(2)
◽
pp. 756-760
◽
Cited By ~ 5
Author(s):
Zhonghua Yan
◽
Wei Liao
◽
Yunfei Zhang
◽
Xia Xiang
◽
Xiaodong Yuan
◽
...
Keyword(s):
Ion Beam
◽
Optical Characterization
◽
Fused Silica
◽
Laser Damage
◽
Ion Beam Sputtering
◽
Beam Sputtering
Download Full-text
A reliable fabrication technique for very low resistance ohmic contacts to p-InGaAs using low energy Ar/sup +/ ion beam sputtering
[Proceedings 1991] Third International Conference Indium Phosphide and Related Materials
◽
10.1109/iciprm.1991.147349
◽
2002
◽
Cited By ~ 1
Author(s):
G. Stareev
◽
A. Umbach
◽
F. Fidorra
◽
H. Roehle
Keyword(s):
Ohmic Contacts
◽
Ion Beam
◽
Low Energy
◽
Fabrication Technique
◽
Ion Beam Sputtering
◽
Low Resistance
◽
Beam Sputtering
Download Full-text
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