Investigation of the DSMC Approach for Ion∕neutral Species in Modeling Low Pressure Plasma Reactor

2011 ◽  
Author(s):  
Hao Deng ◽  
Z. Li ◽  
D. Levin ◽  
L. Gochberg
Keyword(s):  
Plasma Reactor ◽  
Low Pressure ◽  
Neutral Species ◽  
Pressure Plasma ◽  
Low Pressure Plasma

Deposition of thick oxide layers from solutions in a low pressure plasma reactor

2007 ◽  
Vol 202 (4-7) ◽  
pp. 714-718 ◽  
Author(s):  
F. Rousseau ◽  
S. Awamat ◽  
D. Morvan ◽  
J. Amouroux ◽  
R. Mevrel
Keyword(s):  
Plasma Reactor ◽  
Low Pressure ◽  
Oxide Layers ◽  
Pressure Plasma ◽  
Low Pressure Plasma

Effects of Pressure and Electrode Length on the Abatement of N2O and CF4 in a Low-Pressure Plasma Reactor

2016 ◽  
Vol 36 (6) ◽  
pp. 1589-1601
Author(s):  
M. Hur ◽  
J. O. Lee ◽  
J. Y. Lee ◽  
W. S. Kang ◽  
Y.-H. Song
Keyword(s):  
Plasma Reactor ◽  
Low Pressure ◽  
Pressure Plasma ◽  
Electrode Length ◽  
Low Pressure Plasma

Electrochemical studies on Sr doped LaMnO3 and LaCoO3 layers synthesised in a low-pressure plasma reactor equipped with a convergent nozzle

2006 ◽  
Vol 37 (1) ◽  
pp. 95-101 ◽  
Author(s):  
Frédéric Rousseau ◽  
Mehrdad Nikravech ◽  
Linda Benabdelmoumène ◽  
Cédric Guyon ◽  
Daniel Morvan ◽  
...  
Keyword(s):  
Plasma Reactor ◽  
Low Pressure ◽  
Electrochemical Studies ◽  
Convergent Nozzle ◽  
Pressure Plasma ◽  
Low Pressure Plasma

Deposition of thick and 50% porous YpSZ layer by spraying nitrate solution in a low pressure plasma reactor

2011 ◽  
Vol 206 (7) ◽  
pp. 1621-1627 ◽  
Author(s):  
F. Rousseau ◽  
C. Fourmond ◽  
F. Prima ◽  
M.H. Vidal Serif ◽  
O. Lavigne ◽  
...  
Keyword(s):  
Plasma Reactor ◽  
Nitrate Solution ◽  
Low Pressure ◽  
Pressure Plasma ◽  
Low Pressure Plasma
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