Modulation of strain, resistance, and capacitance of tantalum oxide film by converse piezoelectric effect

Applied Physics Letters ◽

10.1063/1.3609012 ◽

2011 ◽

Vol 99 (1) ◽

pp. 011905 ◽

Author(s):

Yanmin Jia ◽

Xiangling Tian ◽

Jianxiao Si ◽

Shihua Huang ◽

Zheng Wu ◽

...

Keyword(s):

Piezoelectric Effect ◽

Tantalum Oxide ◽

Strain Resistance ◽

Converse Piezoelectric Effect ◽

Tantalum Oxide Film

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Reliability of Tantalum Oxide Film Capacitors

10.1515/9783112472842-022 ◽

1989 ◽

pp. 213-223

Author(s):

M. Mohammed ◽

D. Morgan

Keyword(s):

Tantalum Oxide ◽

Tantalum Oxide Film

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Tantalum oxide film formation by excimer laser ablation

Applied Surface Science ◽

10.1016/0169-4332(95)00041-0 ◽

1995 ◽

Vol 89 (4) ◽

pp. 393-399 ◽

Author(s):

Yukio Nishimura ◽

Hiroki Ujita ◽

Masaharu Tsuji

Keyword(s):

Laser Ablation ◽

Excimer Laser ◽

Film Formation ◽

Tantalum Oxide ◽

Excimer Laser Ablation ◽

Tantalum Oxide Film

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A high quality high temperature compatible Tantalum oxide film for advanced dRAM applications

10.1109/iedm.1987.191493 ◽

1987 ◽

Author(s):

B.W. Shen ◽

I.-C. Chen ◽

S. Banerjee ◽

G.A. Brown ◽

J. Bohlman ◽

...

Keyword(s):

High Temperature ◽

Tantalum Oxide ◽

High Quality ◽

Tantalum Oxide Film

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Dielectric properties of niobium oxide film and tantalum oxide film at electrolytic niobium and tantalum capacitors

2012 ELEKTRO ◽

10.1109/elektro.2012.6225671 ◽

2012 ◽

Author(s):

Inas Abuetwirat ◽

Tomas Palai-Dany

Keyword(s):

Dielectric Properties ◽

Niobium Oxide ◽

Tantalum Oxide ◽

Tantalum Oxide Film

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Photo-CVD of Tantalum Oxide Film from Pentamethoxy Tantalum for VLSI Dynamic Memories

Japanese Journal of Applied Physics ◽

10.1143/jjap.25.l306 ◽

1986 ◽

Vol 25 (Part 2, No. 4) ◽

pp. L306-L308 ◽

Author(s):

Koji Yamagishi ◽

Yasuo Tarui

Keyword(s):

Tantalum Oxide ◽

Tantalum Oxide Film

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Tantalum oxide film deposited by vacuum cathodic arc plasma with improved electrochromic performance

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2018.02.034 ◽

2018 ◽

Vol 182 ◽

pp. 188-195 ◽

Author(s):

Po-Wen Chen ◽

Chen-Te Chang ◽

Md. Manirul Ali ◽

Jin-Yu Wu ◽

Yu-Chen Li ◽

...

Keyword(s):

Tantalum Oxide ◽

Cathodic Arc ◽

Tantalum Oxide Film

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Tantalum oxide film deposition by laser ablation

Applied Surface Science ◽

10.1016/0169-4332(94)90406-5 ◽

1994 ◽

Vol 79-80 ◽

pp. 165-170 ◽

Author(s):

Yukio Nishimura ◽

Ujita Hiroki ◽

Terufumi Ochiai ◽

Masaharu Tsuji

Keyword(s):

Laser Ablation ◽

Tantalum Oxide ◽

Film Deposition ◽

Tantalum Oxide Film

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Electrooxidation of methanol and ethanol in acidic medium using a platinum electrode modified with lanthanum-doped tantalum oxide film

Electrochimica Acta ◽

10.1016/j.electacta.2014.11.049 ◽

2015 ◽

Vol 151 ◽

pp. 544-551 ◽

Author(s):

Yanhong Zhao ◽

Ruoyu Wang ◽

Zhixia Han ◽

Congyan Li ◽

Yongsheng Wang ◽

...

Keyword(s):

Acidic Medium ◽

Platinum Electrode ◽

Tantalum Oxide ◽

Electrooxidation Of Methanol ◽

Tantalum Oxide Film

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Resistive switching in a few nanometers thick tantalum oxide film formed by a metal oxidation

Applied Physics Letters ◽

10.1063/1.4919724 ◽

2015 ◽

Vol 106 (17) ◽

pp. 173110 ◽

Author(s):

Takeo Ohno ◽

Seiji Samukawa

Keyword(s):

Resistive Switching ◽

Tantalum Oxide ◽

Metal Oxidation ◽

Tantalum Oxide Film

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Tantalum oxide film prepared by reactive magnetron sputtering deposition for all-solid-state electrochromic device

Thin Solid Films ◽

10.1016/j.tsf.2011.08.046 ◽

2011 ◽

Vol 520 (5) ◽

pp. 1454-1459 ◽

Author(s):

Sheng-Chang Wang ◽

Kuang-Yi Liu ◽

Jow-Lay Huang

Keyword(s):

Solid State ◽

Magnetron Sputtering ◽

Tantalum Oxide ◽

Reactive Magnetron Sputtering ◽

Electrochromic Device ◽

Reactive Magnetron ◽

Sputtering Deposition ◽

Tantalum Oxide Film

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