Dose influence on the PMMA e-resist for the development of high-aspect ratio and reproducible sub-micrometric structures by electron beam lithography
2001 ◽
Vol 57-58
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pp. 291-296
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2012 ◽
Vol 30
(6)
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pp. 06FI01
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2000 ◽
Vol 18
(6)
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pp. 3419
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