Mask-free construction of three-dimensional silicon structures by dry etching assisted gray-scale femtosecond laser direct writing

2017 ◽  
Vol 110 (9) ◽  
pp. 091602 ◽  
Author(s):  
Xue-Qing Liu ◽  
Lei Yu ◽  
Qi-Dai Chen ◽  
Hong-Bo Sun
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Dry Etching ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Gray Scale ◽  
Free Construction ◽  
Silicon Structures

Three-dimensional staggered herringbone mixer fabricated by femtosecond laser direct writing

2013 ◽  
Vol 15 (2) ◽  
pp. 025601 ◽  
Author(s):  
Di Lin ◽  
Fei He ◽  
Yang Liao ◽  
Jintian Lin ◽  
Changning Liu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing

Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing

Lab on a Chip ◽  
2012 ◽  
Vol 12 (4) ◽  
pp. 746 ◽  
Author(s):  
Yang Liao ◽  
Jiangxin Song ◽  
En Li ◽  
Yong Luo ◽  
Yinglong Shen ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Rapid Prototyping ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Microfluidic Mixers

Three-dimensional integration of micro-optics in bulk silica glass by femtosecond laser direct writing: potential for industrial applications

2008 ◽  
Author(s):  
Takayuki Nakaya ◽  
Daisuke Shibata ◽  
Yoshihito Hatazawa ◽  
Kazuhiko Sunakawa ◽  
Yoichi Yaguchi ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Silica Glass ◽  
Three Dimensional ◽  
Industrial Applications ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Micro Optics ◽  
Bulk Silica

Three-dimensional micropatterning of graphene by femtosecond laser direct writing technology

2019 ◽  
Vol 45 (1) ◽  
pp. 113 ◽  
Author(s):  
Yu-Qing Liu ◽  
Jiang-Wei Mao ◽  
Zhao-Di Chen ◽  
Dong-Dong Han ◽  
Zhi-Zhen Jiao ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Writing Technology

Three-dimensional sub-wavelength fabrication by integration of additive and subtractive femtosecond-laser direct writing

2013 ◽  
Vol 1499 ◽  
Author(s):  
Wei Xiong ◽  
Yunshen Zhou ◽  
Xiangnan He ◽  
Yang Gao ◽  
Masoud Mahjouri-Samani ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Nano Fabrication ◽  
Two Photon ◽  
Micro Fluidics ◽  
Wide Range ◽  
Device Structures ◽  
Two Photon Polymerization

ABSTRACTAdditive nanofabrication by two-photon polymerization (TPP) has recently drawn increased attention due to its sub-100 nm resolution and truly three-dimensional (3D) structuring capability. However, besides additive processes, subtractive process is also demanded for many 3D fabrications. Method possessing both additive and subtractive fabrication capabilities was rarely reported. In this study, we developed a complementary 3D micro/nano-fabrication process by integrating both additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) into a single platform of femtosecond-laser direct writing process. Functional device structures were successfully fabricated including: polymer fiber Bragg gratings containing periodic holes of 500-nm diameter and 3D micro-fluidic systems containing arrays of channels of 1-µm diameter. The integration of TPP and MPA processes enhances the nanofabrication efficiency and enables the fabrication of complex 3D micro/nano-structures that are impractical to produce by either TPP or MPA alone, which is promising for a wide range of applications including integrated optics, metamaterials, MEMS, and micro-fluidics.

Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing

2010 ◽  
Vol 35 (19) ◽  
pp. 3225 ◽  
Author(s):  
Yang Liao ◽  
Yongfeng Ju ◽  
Long Zhang ◽  
Fei He ◽  
Qiang Zhang ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Microfluidic Channel ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Arbitrary Length
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