Pulsed laser deposition of piezoelectric lead zirconate titanate thin films maintaining a post-CMOS compatible thermal budget

2017 ◽  
Vol 122 (11) ◽  
pp. 114502 ◽  
Author(s):  
A. Schatz ◽  
D. Pantel ◽  
T. Hanemann
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Lead Zirconate Titanate ◽  
Pulsed Laser ◽  
Lead Zirconate ◽  
Laser Deposition ◽  
Thermal Budget ◽  
Zirconate Titanate ◽  
Piezoelectric Lead Zirconate Titanate ◽  
Cmos Compatible

Hard and Soft Composition Lead Zirconate Titanate Thin Films Deposited by Pulsed Laser Deposition

1996 ◽  
Vol 459 ◽  
Author(s):  
Johanna L. Lacey ◽  
Susan Trolier-McKinstry
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Lead Zirconate Titanate ◽  
Biaxial Tension ◽  
Pulsed Laser ◽  
Lead Zirconate ◽  
Dielectric Constants ◽  
Laser Deposition ◽  
Sensors And Actuators ◽  
Zirconate Titanate

ABSTRACTLead zirconate titanate thin films offer considerably larger piezoelectric coefficients than do ZnO, and so are attractive for microelectromechanical sensors and actuators. To date, much of the research in this field has concentrated on undoped PZT. In this work, PZT films grown from both hard and soft PZT targets have been deposited on platinum coated silicon wafers by pulsed laser deposition so that the effect of doping on the properties can be determined. Dielectric constants of 1000–1500 are regularly achieved in both types of films, with loss values varying from 0.01 for soft films to 0.03 for hard films. Remanent polarizations are typically 30 μC/cm2 for both types of films with no observable difference in coercive fields. When subjected to ∼140 MPa of biaxial tension and compression, only small (∼5%) reversible changes were observed, indicating a lack of substantial domain reorientation in the films.

Pulsed Laser Deposition and Ferroelectric Characterization of Nanostructured Perovskite Lead Zirconate Titanate (52/48) Thin Films

2013 ◽  
Vol 13 (3) ◽  
pp. 1938-1942 ◽  
Author(s):  
M. Prabu ◽  
I. B. Shameem Banu ◽  
G. V. Vijayaraghavan ◽  
S. Gobalakrishnan ◽  
Murthy Chavali
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Lead Zirconate Titanate ◽  
Pulsed Laser ◽  
Lead Zirconate ◽  
Laser Deposition ◽  
Zirconate Titanate
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