Growth of lead zirconate titanate thin films by hybrid processing: sol–gel method and pulsed-laser deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2003.10.072 ◽

2004 ◽

Vol 262 (1-4) ◽

pp. 359-365 ◽

Author(s):

Zhan Jie Wang ◽

Hiroyuki Kokawa ◽

Ryutaro Maeda

Keyword(s):

Pulsed Laser Deposition ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Pulsed Laser ◽

Lead Zirconate ◽

Laser Deposition ◽

Sol Gel Method ◽

Zirconate Titanate

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Preparation and Characterization of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing: Sol-Gel Method and Pulsed Laser Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.5936 ◽

2003 ◽

Vol 42 (Part 1, No. 9B) ◽

pp. 5936-5940 ◽

Author(s):

Zhan Jie Wang ◽

Li Jun Yan ◽

Yuki Aoki ◽

Hiroyuki Kokawa ◽

Ryutaro Maeda

Keyword(s):

Pulsed Laser Deposition ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Pulsed Laser ◽

Lead Zirconate ◽

Laser Deposition ◽

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In situ growth of lead zirconate titanate thin films by hybrid process: sol–gel method and pulsed-laser deposition

Acta Materialia ◽

10.1016/j.actamat.2004.10.012 ◽

2005 ◽

Vol 53 (3) ◽

pp. 593-600 ◽

Author(s):

Z.J. Wang ◽

H. Kokawa ◽

R. Maeda

Keyword(s):

Pulsed Laser Deposition ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Pulsed Laser ◽

Lead Zirconate ◽

Laser Deposition ◽

In Situ Growth ◽

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Intrinsic resputtering in pulsed‐laser deposition of lead‐zirconate‐titanate thin films

Applied Physics Letters ◽

10.1063/1.113560 ◽

1995 ◽

Vol 66 (2) ◽

pp. 245-247 ◽

Author(s):

S. K. Hau ◽

K. H. Wong ◽

P. W. Chan ◽

C. L. Choy

Keyword(s):

Pulsed Laser Deposition ◽

Lead Zirconate Titanate ◽

Pulsed Laser ◽

Lead Zirconate ◽

Laser Deposition ◽

Zirconate Titanate

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Microstructure and electrical properties of lead zirconate titanate thin films deposited by sol-gel method on La0.7Sr0.3MnO3/SiO2/Si substrate

Journal of Sol-Gel Science and Technology ◽

10.1007/s10971-007-0762-4 ◽

2007 ◽

Vol 42 (3) ◽

pp. 375-379 ◽

Author(s):

Zhan Jie Wang ◽

Hirokazu Usuki ◽

Toshihide Kumagai ◽

Hiroyuki Kokawa

Keyword(s):

Electrical Properties ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Si Substrate ◽

Sol Gel Method ◽

Zirconate Titanate

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Preparation and Characterization of Lead Zirconate Titanate Heterolayered Thin Films on Pt/Ti/SiO2/Si Substrate by Sol–Gel Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.217 ◽

1999 ◽

Vol 38 (Part 1, No. 1A) ◽

pp. 217-218 ◽

Author(s):

Sung-Gap Lee ◽

Kwang-Taek Shim ◽

Young-Hie Lee

Keyword(s):

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Si Substrate ◽

Sol Gel Method ◽

Zirconate Titanate

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Preparation of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing: Sol-Gel Method and Laser Ablation

Journal of the American Ceramic Society ◽

10.1111/j.1151-2916.2002.tb00592.x ◽

2004 ◽

Vol 85 (12) ◽

pp. 3108-3110 ◽

Author(s):

Zhan Jie Wang ◽

Isao Karibe ◽

Ryutaro Maeda ◽

Hiroyuki Kokawa

Keyword(s):

Laser Ablation ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Sol Gel Method ◽

Zirconate Titanate

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Lanthanum doped lead zirconate titanate stannate antiferroelectric thin films from acetic acid-based sol–gel method

Materials Letters ◽

10.1016/s0167-577x(97)00165-1 ◽

1998 ◽

Vol 34 (3-6) ◽

pp. 157-160 ◽

Author(s):

Baomin Xu ◽

Neelesh G. Pai ◽

L.Eric Cross

Keyword(s):

Acetic Acid ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Sol Gel Method ◽

Zirconate Titanate

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Electro-Optic Properties of Lanthanum-Modified Lead Zirconate Titanate Thin Films Epitaxially Grown by the Advanced Sol–Gel Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.l244 ◽

2007 ◽

Vol 46 (No. 11) ◽

pp. L244-L246 ◽

Author(s):

Kiyoshi Uchiyama ◽

Atsushi Kasamatsu ◽

Yohei Otani ◽

Tadashi Shiosaki

Keyword(s):

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Sol Gel Method ◽

Zirconate Titanate ◽

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Electrical Properties and Microstructure of Lead Zirconate Titanate Thin FilmIn SituGrown by Hybrid Processing:Sol-Gel Method and Pulsed Laser Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.6554 ◽

2004 ◽

Vol 43 (9B) ◽

pp. 6554-6557 ◽

Author(s):

Zhan Jie Wang ◽

Hiroyuki Kokawa ◽

Ryutaro Maeda ◽

Masaaki Ichiki

Keyword(s):

Electrical Properties ◽

Pulsed Laser Deposition ◽

Lead Zirconate Titanate ◽

Pulsed Laser ◽

Lead Zirconate ◽

Laser Deposition ◽

Zirconate Titanate

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Pulsed laser deposition of piezoelectric lead zirconate titanate thin films maintaining a post-CMOS compatible thermal budget

Journal of Applied Physics ◽

10.1063/1.5000367 ◽

2017 ◽

Vol 122 (11) ◽

pp. 114502 ◽

Author(s):

A. Schatz ◽

D. Pantel ◽

T. Hanemann

Keyword(s):

Pulsed Laser Deposition ◽

Lead Zirconate Titanate ◽

Pulsed Laser ◽

Lead Zirconate ◽

Laser Deposition ◽

Thermal Budget ◽

Zirconate Titanate ◽

Piezoelectric Lead Zirconate Titanate ◽

Cmos Compatible

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