Over the past few years, thanks to the success of microprocessor technology, there has been a significant leap in the development and application of automated control systems. In such systems, information obtained from a set of sensors installed on the control object and giving complete information about it is used to form the control action. Improving the accuracy of measurement of their characteristics becomes an urgent task. This paper is considered to study of the processes of degradation of microelectromechanical structures of integral measuring tensometric elements, for example, pressure sensors, expressed in the obtaining of the output characteristics of the sensor for the regulations set forth in the technical specifications. The technique allowing to measure the parameters of the output signal of the strain cell with the help of a special installation is developed. The results of the experiments determined that when using material with a small modulus of elasticity can be used for the planting element, any substrate material of test module. The developed technique can be used in the production and design of the strain gauge, and the sensor as a whole.
