Effects of hydrogen ion implantation dose on physical and electrical properties of Ge-on-insulator layers fabricated by the smart-cut process
Keyword(s):
2019 ◽
Keyword(s):
1998 ◽
Vol 37
(Part 1, No. 12B)
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pp. 7138-7142
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1994 ◽
Vol 211
(2)
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pp. 127-134
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2006 ◽
Vol 6
(3)
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pp. 495-498
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Keyword(s):
2008 ◽
Vol 15
(4)
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pp. 77-81
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1978 ◽
Vol 149
(1-3)
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pp. 529-533
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