scholarly journals Estimating electron temperature and density using improved collisional-radiative model in high-density RF argon plasma

AIP Advances ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 075226
Author(s):  
H. Horita ◽  
D. Kuwahara ◽  
H. Akatsuka ◽  
S. Shinohara
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