Spectroscopic Measurement of the Electron Temperature and the Metastable Densities by Using a Simple Collisional-Radiative Model in a Low-Pressure Inductively-Coupled Argon Plasma

2008 ◽  
Vol 52 (6) ◽  
pp. 1792-1799 ◽  
Author(s):  
Young-Kwang Lee ◽  
Kwang-Tae Hwang ◽  
Min-Hyong Lee ◽  
Chin-Wook Chung
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