Experimental and numerical study of the plasma in coaxial capacitive coupled radio frequency discharge

Sara Alhomsi; Gérard Bauville; Stéphane Pasquiers; Tiberiu Minea

doi:10.1063/5.0060781

Experimental and numerical study of the plasma in coaxial capacitive coupled radio frequency discharge

Journal of Applied Physics ◽

10.1063/5.0060781 ◽

2021 ◽

Vol 130 (12) ◽

pp. 123302

Author(s):

Sara Alhomsi ◽

Gérard Bauville ◽

Stéphane Pasquiers ◽

Tiberiu Minea

Keyword(s):

Radio Frequency ◽

Numerical Study ◽

Radio Frequency Discharge

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Numerical study on characteristics of radio-frequency discharge at atmospheric pressure in argon with small admixtures of oxygen

Plasma Science and Technology ◽

10.1088/2058-6272/aa6156 ◽

2017 ◽

Vol 19 (7) ◽

pp. 075402 ◽

Cited By ~ 1

Author(s):

Yinan WANG ◽

Yue LIU

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Numerical Study ◽

Radio Frequency Discharge

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Numerical study of period multiplication and chaotic phenomena in an atmospheric radio-frequency discharge

Physics of Plasmas ◽

10.1063/1.3392291 ◽

2010 ◽

Vol 17 (4) ◽

pp. 043507 ◽

Cited By ~ 21

Author(s):

Jiao Zhang ◽

Yanhui Wang ◽

Dezhen Wang

Keyword(s):

Radio Frequency ◽

Numerical Study ◽

Chaotic Phenomena ◽

Atmospheric Radio ◽

Radio Frequency Discharge

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RADIO FREQUENCY DISCHARGE PLASMA AND HELICON SOURCE FOR DIFFERENT APPLICATIONS

High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) ◽

10.1615/hightempmatproc.2015015432 ◽

2014 ◽

Vol 18 (1-2) ◽

pp. 111-117

Author(s):

Victor V. Kuzenov ◽

Tatiana N. Polozova

Keyword(s):

Radio Frequency ◽

Discharge Plasma ◽

Helicon Source ◽

Radio Frequency Discharge

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Silane thermometry in radio‐frequency discharge plasma by coherent anti‐Stokes Raman spectroscopy

Journal of Applied Physics ◽

10.1063/1.336415 ◽

1986 ◽

Vol 59 (6) ◽

pp. 1872-1874 ◽

Cited By ~ 10

Author(s):

Nobuhiro Hata ◽

Akihisa Matsuda ◽

Kazunobu Tanaka

Keyword(s):

Raman Spectroscopy ◽

Radio Frequency ◽

Discharge Plasma ◽

Anti Stokes ◽

Radio Frequency Discharge

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Power dissipated in low‐pressure radio‐frequency discharge plasmas

Journal of Applied Physics ◽

10.1063/1.335395 ◽

1985 ◽

Vol 57 (1) ◽

pp. 53-58 ◽

Cited By ~ 103

Author(s):

O. A. Popov ◽

V. A. Godyak

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Discharge Plasmas ◽

Radio Frequency Discharge

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Experimental measurements in a radio-frequency discharge heated supersonic flow - Evaluation of a potential electric propulsion thruster

10.2514/6.1991-3615 ◽

1991 ◽

Author(s):

P. WANTUCK ◽

D. HULL

Keyword(s):

Supersonic Flow ◽

Radio Frequency ◽

Electric Propulsion ◽

Experimental Measurements ◽

Radio Frequency Discharge

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Effect of plasma‐surface interactions on the radial variation of H atom density in a hydrogen radio frequency discharge

Journal of Applied Physics ◽

10.1063/1.357722 ◽

1994 ◽

Vol 76 (3) ◽

pp. 1476-1479 ◽

Cited By ~ 13

Author(s):

B. N. Ganguly ◽

P. Bletzinger

Keyword(s):

Radio Frequency ◽

Surface Interactions ◽

Radial Variation ◽

Atom Density ◽

Plasma Surface ◽

Plasma Surface Interactions ◽

Radio Frequency Discharge

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Combined PIC–MCC approach for fast simulation of a radio frequency discharge at a low gas pressure

Plasma Sources Science and Technology ◽

10.1088/0963-0252/13/2/018 ◽

2004 ◽

Vol 13 (2) ◽

pp. 315-320 ◽

Cited By ~ 22

Author(s):

I V Schweigert ◽

V A Schweigert

Keyword(s):

Radio Frequency ◽

Gas Pressure ◽

Fast Simulation ◽

Radio Frequency Discharge

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Probe measurements of the space potential in a radio frequency discharge

Journal of Applied Physics ◽

10.1063/1.346389 ◽

1990 ◽

Vol 68 (7) ◽

pp. 3157-3162 ◽

Cited By ~ 61

Author(s):

V. A. Godyak ◽

R. B. Piejak

Keyword(s):

Radio Frequency ◽

Space Potential ◽

Radio Frequency Discharge ◽

Probe Measurements

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Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/40/22/022 ◽

2007 ◽

Vol 40 (22) ◽

pp. 7008-7018 ◽

Cited By ~ 92

Author(s):

J Schulze ◽

T Gans ◽

D O'Connell ◽

U Czarnetzki ◽

A R Ellingboe ◽

...

Keyword(s):

Radio Frequency ◽

Dual Frequency ◽

Plasma Parameters ◽

Capacitively Coupled ◽

Radio Frequency Discharge

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