Kinetic Monte Carlo simulations compared with continuum models and experimental properties of pattern formation during ion beam sputtering

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/21/22/224016 ◽

2009 ◽

Vol 21 (22) ◽

pp. 224016 ◽

Author(s):

E Chason ◽

W L Chan

Keyword(s):

Monte Carlo ◽

Pattern Formation ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Ion Beam ◽

Continuum Models ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Kinetic Monte Carlo Simulations

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Kinetic Monte Carlo simulation of self-organized pattern formation induced by ion beam sputtering using crater functions

Physical Review B ◽

10.1103/physrevb.91.075427 ◽

2015 ◽

Vol 91 (7) ◽

Author(s):

Zhangcan Yang ◽

Michael A. Lively ◽

Jean Paul Allain

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Pattern Formation ◽

Kinetic Monte Carlo ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Kinetic Monte Carlo Simulation ◽

Self Organized ◽

Beam Sputtering

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Application of the Monte Carlo Method for Simulation of Pattern Formation by Ion-Beam Sputtering of Amorphous Bodies

Mathematical Models and Computer Simulations ◽

10.1134/s2070048218050113 ◽

2018 ◽

Vol 10 (5) ◽

pp. 551-563

Author(s):

M. V. Skachkov

Keyword(s):

Monte Carlo ◽

Monte Carlo Method ◽

Pattern Formation ◽

Ion Beam ◽

Ion Beam Sputtering ◽

The Monte Carlo Method ◽

Beam Sputtering

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An investigation on the removal characteristics of compound materials during ion beam sputtering using the Kinetic Monte Carlo method

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2014.01.010 ◽

2014 ◽

Vol 323 ◽

pp. 1-6 ◽

Author(s):

Xiao Liang ◽

Xiang Wang ◽

Erlong Miao ◽

Jinjin Zheng ◽

Fei Wang ◽

...

Keyword(s):

Monte Carlo ◽

Monte Carlo Method ◽

Kinetic Monte Carlo ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Kinetic Monte Carlo Method ◽

Beam Sputtering ◽

Compound Materials

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Corrigendum: Monte Carlo simulations of nanoscale focused neon ion beam sputtering of copper: elucidating resolution limits and sub-surface damage (2014 Nanotechnology 25 485704)

Nanotechnology ◽

10.1088/0957-4484/26/11/119501 ◽

2015 ◽

Vol 26 (11) ◽

pp. 119501

Author(s):

R Timilsina ◽

S Tan ◽

R Livengood ◽

P D Rack

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Ion Beam ◽

Surface Damage ◽

Ion Beam Sputtering ◽

Resolution Limits ◽

Beam Sputtering ◽

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Nanoscale pattern formation at surfaces under ion-beam sputtering: A perspective from continuum models

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2010.11.072 ◽

2011 ◽

Vol 269 (9) ◽

pp. 894-900 ◽

Author(s):

Rodolfo Cuerno ◽

Mario Castro ◽

Javier Muñoz-García ◽

Raúl Gago ◽

Luis Vázquez

Keyword(s):

Pattern Formation ◽

Ion Beam ◽

Continuum Models ◽

Ion Beam Sputtering ◽

Beam Sputtering

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Monte Carlo simulations of noble gas ion beam sputtering yield of MgO, CaO, SrO, and BaO with various thin coatings in AC‐PDP cells

Surface and Interface Analysis ◽

10.1002/sia.6721 ◽

2019 ◽

Vol 52 (3) ◽

pp. 84-90 ◽

Author(s):

Ouafae Elhaitamy ◽

Meriem El Marsi ◽

Latifa Lahlou ◽

Kamal El Ghazaouy ◽

Latifa Salama ◽

...

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Noble Gas ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Thin Coatings ◽

Beam Sputtering ◽

Sputtering Yield

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Simultaneous Coupling of Kinetic Monte-Carlo Simulations with Continuum Models to Examine Capacity Fade

ECS Meeting Abstracts ◽

10.1149/ma2012-02/9/730 ◽

2012 ◽

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Kinetic Monte Carlo ◽

Continuum Models ◽

Capacity Fade ◽

Kinetic Monte Carlo Simulations

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Monte Carlo simulations of nanoscale focused neon ion beam sputtering of copper: elucidating resolution limits and sub-surface damage

Nanotechnology ◽

10.1088/0957-4484/25/48/485704 ◽

2014 ◽

Vol 25 (48) ◽

pp. 485704 ◽

Author(s):

R Timilsina ◽

S Tan ◽

R Livengood ◽

P D Rack

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Ion Beam ◽

Surface Damage ◽

Ion Beam Sputtering ◽

Resolution Limits ◽

Beam Sputtering ◽

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Monte Carlo simulations of nanoscale focused neon ion beam sputtering

Nanotechnology ◽

10.1088/0957-4484/24/49/495303 ◽

2013 ◽

Vol 24 (49) ◽

pp. 495303 ◽

Author(s):

Rajendra Timilsina ◽

Philip D Rack

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

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Monte Carlo simulations of nanoscale Ne+ion beam sputtering: investigating the influence of surface effects, interstitial formation, and the nanostructural evolution

Nanotechnology ◽

10.1088/1361-6528/28/4/045305 ◽

2016 ◽

Vol 28 (4) ◽

pp. 045305 ◽

Author(s):

Kyle Mahady ◽

Shida Tan ◽

Yuval Greenzweig ◽

Richard Livengood ◽

Amir Raveh ◽

...

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Ion Beam ◽

Surface Effects ◽

Ion Beam Sputtering ◽

Beam Sputtering

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