The gas-sensing properties of WO3−xthin films deposited via the atmospheric pressure chemical vapour deposition (APCVD) of WCl6with ethanol

2008 ◽  
Vol 19 (2) ◽  
pp. 025203 ◽  
Author(s):  
Sobia Ashraf ◽  
Christopher S Blackman ◽  
Simon C Naisbitt ◽  
Ivan P Parkin
Keyword(s):  
Chemical Vapour Deposition ◽  
Atmospheric Pressure ◽  
Vapour Deposition ◽  
Gas Sensing ◽  
Chemical Vapour ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Pressure Chemical

Aerosol assisted chemical vapour deposition of WO3 thin films from tungsten hexacarbonyl and their gas sensing properties

2007 ◽  
Vol 17 (35) ◽  
pp. 3708 ◽  
Author(s):  
Sobia Ashraf ◽  
Christopher S. Blackman ◽  
Robert G. Palgrave ◽  
Simon C. Naisbitt ◽  
Ivan P. Parkin
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Gas Sensing ◽  
Chemical Vapour ◽  
Tungsten Hexacarbonyl ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Wo3 Thin Films

scholarly journals Atmospheric pressure chemical vapour deposition of fluorine-doped tin(IV) oxide from fluoroalkyltin precursors

2005 ◽  
Vol 19 (5) ◽  
pp. 644-657 ◽  
Author(s):  
Joanne E. Stanley ◽  
Anthony C. Swain ◽  
Kieran C. Molloy ◽  
David W. H. Rankin ◽  
Heather E. Robertson ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Atmospheric Pressure ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Pressure Chemical
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