Lifetime limitations of ohmic, contacting RF MEMS switches with Au, Pt and Ir contact materials due to accumulation of ‘friction polymer’ on the contacts

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/22/10/105005 ◽

2012 ◽

Vol 22 (10) ◽

pp. 105005 ◽

Author(s):

David A Czaplewski ◽

Christopher D Nordquist ◽

Christopher W Dyck ◽

Gary A Patrizi ◽

Garth M Kraus ◽

...

Keyword(s):

Rf Mems ◽

Contact Materials ◽

Mems Switches ◽

Rf Mems Switches ◽

Friction Polymer

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Contact materials and reliability for high power RF-MEMS switches

10.1109/memsys.2007.4433055 ◽

2007 ◽

Author(s):

Hyouk Kwon ◽

Dong-June Choi ◽

Jae-Hyoung Park ◽

Hee-Chul Lee ◽

Yong-Hee Park ◽

...

Keyword(s):

Rf Mems ◽

Contact Materials ◽

Mems Switches ◽

Rf Mems Switches

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Polarization switching antenna integrated with RF MEMS switches using silicon-on-quartz and BCB packaging platform

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2010.5442298 ◽

2010 ◽

Author(s):

Ik-Jae Hyeon ◽

Jinwoo Chung ◽

Sungjoon Lim ◽

Jong-Man Kim ◽

Chang-Wook Baek

Keyword(s):

Rf Mems ◽

Polarization Switching ◽

Mems Switches ◽

Rf Mems Switches

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Intermodulation distortion and power handling in RF MEMS switches, varactors, and tunable filters

IEEE Transactions on Microwave Theory and Techniques ◽

10.1109/tmtt.2003.809650 ◽

2003 ◽

Vol 51 (4) ◽

pp. 1247-1256 ◽

Author(s):

L. Dussopt ◽

G.M. Rebeiz

Keyword(s):

Rf Mems ◽

Tunable Filters ◽

Intermodulation Distortion ◽

Mems Switches ◽

Power Handling ◽

Rf Mems Switches

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Low Cost Method for Localized Packaging of Temperature Sensitive Capacitive RF MEMS Switches in Liquid Crystal Polymer

2007 IEEE/MTT-S International Microwave Symposium ◽

10.1109/mwsym.2007.380295 ◽

2007 ◽

Author(s):

Matthew A. Morton ◽

Nickolas Kingsley ◽

John Papapolymerou

Keyword(s):

Liquid Crystal ◽

Rf Mems ◽

Low Cost ◽

Liquid Crystal Polymer ◽

Temperature Sensitive ◽

Mems Switches ◽

Crystal Polymer ◽

Rf Mems Switches

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Lifetime characterization of capacitive RF MEMS switches

10.1117/12.590132 ◽

2005 ◽

Author(s):

Afshin Ziaei ◽

Thierry Dean ◽

Jean-Philippe Polizzi

Keyword(s):

Rf Mems ◽

Mems Switches ◽

Rf Mems Switches

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CMOS Compatible RF MEMS Switches with Serpentine Springs

ECS Transactions ◽

10.1149/1.3096419 ◽

2019 ◽

Vol 18 (1) ◽

pp. 9-14

Author(s):

Xiao L. Evans ◽

H.S. Gamble ◽

P.T. Baine ◽

S.J.N. Mitchell ◽

J. Montgomery ◽

...

Keyword(s):

Rf Mems ◽

Mems Switches ◽

Rf Mems Switches ◽

Cmos Compatible

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Lifetime characterization of capacitive power RF MEMS switches

10.1117/12.654483 ◽

2006 ◽

Author(s):

Afshin Ziaei ◽

Thierry Dean ◽

Yves Mancuso

Keyword(s):

Rf Mems ◽

Mems Switches ◽

Rf Mems Switches

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Effect of deposition parameters on surface roughness and consequent electromagnetic performance of capacitive RF MEMS switches: a review

Journal of Micromechanics and Microengineering ◽

10.1088/1361-6439/aa8917 ◽

2017 ◽

Vol 27 (11) ◽

pp. 113003 ◽

Author(s):

Zhiqiang Chen ◽

Wenchao Tian ◽

Xiaotong Zhang ◽

Yongkun Wang

Keyword(s):

Surface Roughness ◽

Rf Mems ◽

Mems Switches ◽

Deposition Parameters ◽

Rf Mems Switches ◽

Electromagnetic Performance

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Design and process considerations for fabricating RF MEMS switches on printed circuit boards

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2005.859088 ◽

2005 ◽

Vol 14 (6) ◽

pp. 1311-1322 ◽

Author(s):

Hung-Pin Chang ◽

Jiangyuan Qian ◽

B.A. Cetiner ◽

F. De Flaviis ◽

M. Bachman ◽

...

Keyword(s):

Printed Circuit Boards ◽

Rf Mems ◽

Circuit Boards ◽

Mems Switches ◽

Printed Circuit ◽

Rf Mems Switches

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A miniaturized reconfigurable broadband attenuator based on RF MEMS switches

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/26/7/074002 ◽

2016 ◽

Vol 26 (7) ◽

pp. 074002 ◽

Author(s):

Xin Guo ◽

Zhuhao Gong ◽

Qi Zhong ◽

Xiaotong Liang ◽

Zewen Liu

Keyword(s):

Rf Mems ◽

Mems Switches ◽

Rf Mems Switches

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