Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity
2013 ◽
Vol 23
(3)
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pp. 035032
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Keyword(s):
2012 ◽
Vol 132
(7)
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pp. 224-229
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Keyword(s):
2012 ◽
Vol 51
(11S)
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pp. 11PA02
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Keyword(s):
2012 ◽
Vol 2012.4
(0)
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pp. 223-224
2012 ◽
Vol 51
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pp. 11PA02
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Keyword(s):
1998 ◽
Vol 45
(12)
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pp. 2548-2551
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Keyword(s):
Keyword(s):
2009 ◽
Vol 48
(5)
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pp. 052402
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Keyword(s):
2016 ◽
Vol 63
(10)
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pp. 3964-3970
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