Rapid fabrication of a four-layer PMMA-based microfluidic chip using CO2-laser micromachining and thermal bonding

2016 ◽  
Vol 26 (10) ◽  
pp. 107001 ◽  
Author(s):  
Xueye Chen ◽  
Jienan Shen ◽  
Mengde Zhou
Keyword(s):  
Co2 Laser ◽  
Microfluidic Chip ◽  
Laser Micromachining ◽  
Thermal Bonding ◽  
Rapid Fabrication

Study on the Manufacturing Process of Polymer Microfluidic Chip with Integrated Cu Micro Array Electrode

2015 ◽  
Vol 723 ◽  
pp. 884-887
Author(s):  
Yao Xin Gu ◽  
Hong Chao Qiao
Keyword(s):  
Microfluidic Chip ◽  
Manufacturing Process ◽  
Oxygen Plasma ◽  
Bonding Temperature ◽  
Cover Plate ◽  
Oxygen Plasma Treatment ◽  
Thermal Bonding ◽  
Array Electrode ◽  
Micro Channels ◽  
Micro Array

To produce perfect polymer microfluidic chip with integrated metal micro array electrode, an oxygen-plasma assisted manufacturing process was developed. The Cu micro array electrodes on the poly substrate was formed by photolithography, sputtering and wet etching; the micro channels on the polymer plate were hot-embossed using metal master; the bonding of cover plate and substrate using thermal bonding. The surface of the polymer plate with micro channels was treated by oxygen-plasma before thermal bonding. The oxygen-plasma treatment could decrease thermal bonding temperature from 100 °C to 85 °C. The bonding of this chip is complete, the micro electrode array keeps its integrity, and the micro channel is not distorted obviously.

Rapid Fabrication of Glass Micro-Lens Array by Using CO2 Laser

Applied laser ◽  
2014 ◽  
Vol 34 (1) ◽  
pp. 62-66
Author(s):  
刘先晖 Liu Xianhui ◽  
陈涛 Chen Tao ◽  
郑崇 Zheng Chong ◽  
梁晓莉 Liang Xiaoli
Keyword(s):  
Co2 Laser ◽  
Lens Array ◽  
Rapid Fabrication ◽  
Micro Lens Array ◽  
Micro Lens

CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems

Lab on a Chip ◽  
2002 ◽  
Vol 2 (4) ◽  
pp. 242 ◽  
Author(s):  
Henning Klank ◽  
J�rg P. Kutter ◽  
Oliver Geschke
Keyword(s):  
Co2 Laser ◽  
Laser Micromachining ◽  
Microfluidic Systems ◽  
Rapid Production
Sign in / Sign up

Export Citation Format

Share Document