Experimental Investigation on Electromagnetic Attenuation by Low Pressure Radio-Frequency Plasma for Cavity Structure

2016 ◽  
Vol 18 (1) ◽  
pp. 62-66 ◽  
Author(s):  
Xiang He ◽  
Yachun Zhang ◽  
Jianping Chen ◽  
Yudong Chen ◽  
Xiaojun Zeng ◽  
...  
Keyword(s):  
Experimental Investigation ◽  
Radio Frequency ◽  
Low Pressure ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Cavity Structure

scholarly journals Self-excited instability occurring during the nanoparticle formation in an Ar–SiH4 low pressure radio frequency plasma

2006 ◽  
Vol 99 (6) ◽  
pp. 064301 ◽  
Author(s):  
M. Cavarroc ◽  
M. C. Jouanny ◽  
K. Radouane ◽  
M. Mikikian ◽  
L. Boufendi
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Radio Frequency Plasma ◽  
Nanoparticle Formation ◽  
Frequency Plasma

Destruction of methane in low-pressure, electrodeless radio frequency plasma on quartz walls

2011 ◽  
Vol 110 (5) ◽  
pp. 053302 ◽  
Author(s):  
Miran Mozetic ◽  
Alenka Vesel ◽  
Daniel Alegre ◽  
Francisco L. Tabares
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

scholarly journals CF4 Decomposition Using Low-Pressure Pulse-Modulated Radio Frequency Plasma

2005 ◽  
Vol 48 (3) ◽  
pp. 440-447 ◽  
Author(s):  
Tomoyuki KUROKI ◽  
Shingo TANAKA ◽  
Masaaki OKUBO ◽  
Toshiaki YAMAMOTO
Keyword(s):  
Radio Frequency ◽  
Pressure Pulse ◽  
Low Pressure ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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