Study of volume and surface processes in low pressure radio frequency plasma reactors by pulsed excitation methods. I. Hydrogen–argon plasma

1991 ◽  
Vol 9 (2) ◽  
pp. 317-326 ◽  
Author(s):  
André Bouchoule ◽  
Pierre Ranson
Keyword(s):  
Radio Frequency ◽  
Argon Plasma ◽  
Low Pressure ◽  
Surface Processes ◽  
Radio Frequency Plasma ◽  
Plasma Reactors ◽  
Pulsed Excitation ◽  
Frequency Plasma

Experimental Investigation on Electromagnetic Attenuation by Low Pressure Radio-Frequency Plasma for Cavity Structure

2016 ◽  
Vol 18 (1) ◽  
pp. 62-66 ◽  
Author(s):  
Xiang He ◽  
Yachun Zhang ◽  
Jianping Chen ◽  
Yudong Chen ◽  
Xiaojun Zeng ◽  
...  
Keyword(s):  
Experimental Investigation ◽  
Radio Frequency ◽  
Low Pressure ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Cavity Structure

scholarly journals Self-excited instability occurring during the nanoparticle formation in an Ar–SiH4 low pressure radio frequency plasma

2006 ◽  
Vol 99 (6) ◽  
pp. 064301 ◽  
Author(s):  
M. Cavarroc ◽  
M. C. Jouanny ◽  
K. Radouane ◽  
M. Mikikian ◽  
L. Boufendi
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Radio Frequency Plasma ◽  
Nanoparticle Formation ◽  
Frequency Plasma

scholarly journals MATHEMATICAL MODEL OF THE INTERACTION OF LOW-ENERGY INERT GAS IONS WITH POLYPROPYLENE IN RADIO-FREQUENCY PLASMA OF LOW PRESSURE

2021 ◽  
Vol 53 (3) ◽  
pp. 18-23
Author(s):  
Yulia A. Timoshina ◽  
Emil F. Voznesensky ◽  
Victor S. Zheltukhin
Keyword(s):  
Radio Frequency ◽  
Argon Atom ◽  
Argon Plasma ◽  
Low Pressure ◽  
Low Energy ◽  
Fibrous Materials ◽  
Frequency Plasma ◽  
Argon Ion Bombardment ◽  
Low Energy Ions ◽  
Argon Ion

Results of the molecular dynamic simulation of the interaction of low-energy ions (from 10 to 100 eV) with the surface of polypropylene fibrous materials in low pressure radio-frequency (RF) argon plasma is presented. A full-atomic model using the LAMMPS classical molecular dynamics code was made. As a result of numerical calculations, it was found that argon ion bombardment initiates the breaking both of an intermolecular and intramolecular bond of polypropylene with sputtered particles being the hydrocarbon radicals and single atoms. The depth of implantation of the ion is determined, the change in the kinetic energy of the argon atom and the temperature of the simulated cell is obtained.

Destruction of methane in low-pressure, electrodeless radio frequency plasma on quartz walls

2011 ◽  
Vol 110 (5) ◽  
pp. 053302 ◽  
Author(s):  
Miran Mozetic ◽  
Alenka Vesel ◽  
Daniel Alegre ◽  
Francisco L. Tabares
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

scholarly journals CF4 Decomposition Using Low-Pressure Pulse-Modulated Radio Frequency Plasma

2005 ◽  
Vol 48 (3) ◽  
pp. 440-447 ◽  
Author(s):  
Tomoyuki KUROKI ◽  
Shingo TANAKA ◽  
Masaaki OKUBO ◽  
Toshiaki YAMAMOTO
Keyword(s):  
Radio Frequency ◽  
Pressure Pulse ◽  
Low Pressure ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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