High density Al
2
O
3
/TaN-based metal–insulator–metal capacitors in application to radio frequency integrated circuits
2015 ◽
Vol 50
(8)
◽
pp. 1960-1960
Keyword(s):
2009 ◽
Vol 44
(5)
◽
pp. 1319-1320
Keyword(s):
2018 ◽
Vol 53
(6)
◽
pp. 1872-1872
2014 ◽
Vol 49
(8)
◽
pp. 1872-1872
2013 ◽
Vol 61
(3)
◽
pp. 1005-1005