High density Al 2 O 3 /TaN-based metal–insulator–metal capacitors in application to radio frequency integrated circuits

2007 ◽  
Vol 16 (9) ◽  
pp. 2803-2808 ◽  
Author(s):  
Ding Shi-Jin ◽  
Huang Yu-Jian ◽  
Huang Yue ◽  
Pan Shao-Hui ◽  
Zhang Wei ◽  
...  
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