scholarly journals Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode

2019 ◽  
Vol 29 (4) ◽  
pp. 045009 ◽  
Author(s):  
F Patocka ◽  
M Schneider ◽  
N Dörr ◽  
C Schneidhofer ◽  
U Schmid
Sign in / Sign up

Export Citation Format

Share Document