Ultrashort-pulsed laser processing with spatial and temporal beam shaping using a spatial light modulator and burst modes

We report on the effect of simultaneous spatial and temporal beam shaping on the ablation rate, ablation efficiency and the resulting surface characteristics of micromachined stainless steel using ultrashort-pulsed lasers. Beam shaping and the use of pulse bursts are promising methods to allocate the over the last decades increasing laser power of ultrashort-pulsed lasers in ablation processes. While the individual effects of beam shaping and pulse bursts on the ablation characteristics have recently been examined, the combination of both has not yet been adequately investigated. Using a spatial light modulator to generate different spot distributions with up to six spots and different separations it is possible to spatially distribute the available laser power. In combination with temporal beam shaping using a 200 kHz repetition rate and pulse bursts with a 40 MHz intra-burst rate, we investigate the influences in a scanning-based process and find an increasing ablation rate and efficiency for higher fluences. Subsequently using bursts in combination with a multi-spot beam profile, we found a distinctive emergence of cone like protrusions and a smoothing effect for fluences between 1.5 J/cm² and 3 J/cm² with six spot beam profile.