Light transmission through periodic sub-wavelength textured surface

We have employed Interferometric Lithography (IL) for sub-wavelength surface texturing on large area silicon substrates. Low defect density Reactive Ion Etching (RIE) processes have been developed to transfer the pattern into the silicon using SF 6 plasma. Reflection measurements on the sub-wavelength textured surface have been carried out and show a substantial reduction from ~30% to below 4% over the spectrum range from 400nm to 1200nm. IL is a mask-less lithography technique which is used to define periodic patterns. The theoretical limit of the pitch size of the structure is half of the wavelength of the light source. Hence, the sub-wavelength patterns can be achieved easily. Moreover, sub-wavelength texturing requires short RIE processes; most of the plasma-induced damage on the silicon surface can be avoided.

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Light transmission through a high index dielectric-filled sub-wavelength hole in a metal film

Optics Express ◽

10.1364/opex.13.006980 ◽

2005 ◽

Vol 13 (18) ◽

pp. 6980 ◽

Cited By ~ 22

Author(s):

Juuso Olkkonen ◽

Kari Kataja ◽

Dennis G. Howe

Keyword(s):

Metal Film ◽

Light Transmission ◽

High Index ◽

Sub Wavelength

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Beyond the Bethe Limit: Tunable Enhanced Light Transmission Through a Single Sub-Wavelength Aperture

Advanced Materials ◽

10.1002/(sici)1521-4095(199907)11:10<860::aid-adma860>3.0.co;2-v ◽

1999 ◽

Vol 11 (10) ◽

pp. 860-862 ◽

Cited By ~ 84

Author(s):

Daniel E. Grupp ◽

Henri J. Lezec ◽

Tineke Thio ◽

Thomas W. Ebbesen

Keyword(s):

Light Transmission ◽

Sub Wavelength

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Manipulation of light transmission through sub-wavelength hole array

Journal of Optics A Pure and Applied Optics ◽

10.1088/1464-4258/9/9/s28 ◽

2007 ◽

Vol 9 (9) ◽

pp. S450-S457 ◽

Cited By ~ 5

Author(s):

J F Song ◽

R Proietti Zaccaria

Keyword(s):

Light Transmission ◽

Hole Array ◽

Sub Wavelength

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Less Reflective Sub-Wavelength Structure Formed on Textured Surface Using Nanosphere Mask

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.01ad03 ◽

2013 ◽

Vol 52 (1S) ◽

pp. 01AD03

Author(s):

Chiung-Wei Lin ◽

Cheng-Chieh Juan

Keyword(s):

Textured Surface ◽

Sub Wavelength

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LIGHT PROPAGATING IN METAL SUB-WAVELENGTH-HOLE ARRAYS

NANO ◽

10.1142/s1793292010002207 ◽

2010 ◽

Vol 05 (05) ◽

pp. 295-300 ◽

Cited By ~ 1

Author(s):

YONGAN TANG ◽

BRANISLAV VLAHOVIC ◽

DAVID J. BRADY

Keyword(s):

Finite Difference Time Domain ◽

Gold Film ◽

Light Transmission ◽

Hole Array ◽

Thin Gold Film ◽

Metallic Structures ◽

Hole Arrays ◽

Difference Time ◽

Plasmon Polaritons ◽

Sub Wavelength

We investigate the light propagating through a sub-wavelength-hole array in a thin gold film. The extraordinary light transmission (ELT) of the metallic array is observed. This ELT is due to the localized plasmon polaritons, whose production are dependent on the polarization of the light, the periodicity of the array, the features of the hole, and the thickness of the gold film. These parameters of the metallic structures are investigated through the finite difference time domain method. It is possible to obtain a desired transmission spectrum from the sub-wavelength-hole array by designing these parameters.

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