LIGHT PROPAGATING IN METAL SUB-WAVELENGTH-HOLE ARRAYS

We investigate the light propagating through a sub-wavelength-hole array in a thin gold film. The extraordinary light transmission (ELT) of the metallic array is observed. This ELT is due to the localized plasmon polaritons, whose production are dependent on the polarization of the light, the periodicity of the array, the features of the hole, and the thickness of the gold film. These parameters of the metallic structures are investigated through the finite difference time domain method. It is possible to obtain a desired transmission spectrum from the sub-wavelength-hole array by designing these parameters.

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A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology

Sensors ◽

10.3390/s21010180 ◽

2020 ◽

Vol 21 (1) ◽

pp. 180

Author(s):

Chi-Feng Chen ◽

Chih-Hsiung Shen ◽

Yun-Ying Yeh

Keyword(s):

Fdtd Method ◽

Elliptical Hole ◽

Oxide Semiconductor ◽

Active Area ◽

Hole Array ◽

Cmos Mems ◽

Simulation Results ◽

Hole Arrays ◽

Hole Structure ◽

Sub Wavelength

A thermopile device with sub-wavelength hole array (SHA) is numerically and experimentally investigated. The infrared absorbance (IRA) effect of SHAs in active area of the thermopile device is clearly analyzed by the finite-difference time-domain (FDTD) method. The prototypes are manufactured by the 0.35 μm 2P4M complementary metal-oxide-semiconductor micro-electro-mechanical-systems (CMOS-MEMS) process in Taiwan semiconductor manufacturing company (TSMC). The measurement results of those prototypes are similar to their simulation results. Based on the simulation technology, more sub-wavelength hole structural effects for IRA of such thermopile device are discussed. It is found from simulation results that the results of SHAs arranged in a hexagonal shape are significantly better than the results of SHAs arranged in a square and the infrared absorption efficiencies (IAEs) of specific asymmetric rectangle and elliptical hole structure arrays are higher than the relatively symmetric square and circular hole structure arrays. The overall best results are respectively up to 3.532 and 3.573 times higher than that without sub-wavelength structure at the target temperature of 60 °C when the minimum structure line width limit of the process is ignored. Obviously, the IRA can be enhanced when the SHAs are considered in active area of the thermopile device and the structural optimization of the SHAs is absolutely necessary.

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Infrared Absorption Efficiency Enhancement of the CMOS Compatible Thermopile by the Special Subwavelength Hole Arrays

Applied Sciences ◽

10.3390/app10082966 ◽

2020 ◽

Vol 10 (8) ◽

pp. 2966 ◽

Cited By ~ 2

Author(s):

Yun-Ying Yeh ◽

Chih-Hsiung Shen ◽

Chi-Feng Chen

Keyword(s):

Infrared Absorption ◽

Absorption Efficiency ◽

Hole Array ◽

Rectangular Hole ◽

Efficiency Enhancement ◽

Cmos Compatible ◽

Subwavelength Hole Arrays ◽

Hole Arrays ◽

Difference Time ◽

Rectangular Columns

The infrared absorption efficiency (IAE) enhancement of the complementary-metal-oxide-semiconductorCMOS compatible thermopile with special subwavelength hole arrays in an active area was numerically investigated by the finite-difference time-domain method. It was found that the absorption efficiency of that thermopile was enhanced when the subwavelength rectangular-hole array added extra rectangular-columnar or ellipse-columnar structures in the hole array. The simulation results show that the IAEs of the better cases for the three types of rectangular columns and three ellipse columns were increased by 14.4% and 15.2%, respectively. Such special subwavelength hole arrays can be improved by the IAE of the CMOS compatible thermopile.

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PLASMONIC RACETRACK RESONATOR FOR APPLICATION TO PHOTONIC INTEGRATED CIRCUITS AT SUB-WAVELENGTH

Journal of Nonlinear Optical Physics & Materials ◽

10.1142/s0218863510005790 ◽

2010 ◽

Vol 19 (04) ◽

pp. 583-588 ◽

Cited By ~ 7

Author(s):

HIROYUKI OKAMOTO ◽

KENZO YAMAGUCHI ◽

MASANOBU HARAGUCHI ◽

TOSHIHIRO OKAMOTO

Keyword(s):

Integrated Circuits ◽

Finite Difference Time Domain ◽

Cavity Mode ◽

Ring Resonator ◽

Photonic Integrated Circuits ◽

Plasmonic Waveguides ◽

Order Of Magnitude ◽

Racetrack Resonator ◽

Difference Time ◽

Sub Wavelength

A racetrack resonator, several hundred nanometers in size and composed of plasmonic waveguides is presented. The wavelength spectrum of the plasmonic racetrack resonator has been numerically evaluated by using finite-difference time-domain method. As compared to the conventional plasmonic ring resonator, the output light intensity of the proposed plasmonic racetrack resonator is greater by almost one order of magnitude. The cavity mode of the plasmonic racetrack resonator has also been investigated.

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Theory of extraordinary light transmission through sub-wavelength circular hole arrays

Journal of Optics ◽

10.1088/2040-8978/12/1/015004 ◽

2009 ◽

Vol 12 (1) ◽

pp. 015004 ◽

Cited By ~ 4

Author(s):

Meng Zhang ◽

Cheng-ping Huang ◽

Guo-dong Wang ◽

Yong-yuan Zhu

Keyword(s):

Circular Hole ◽

Light Transmission ◽

Hole Arrays ◽

Sub Wavelength

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LOCALIZED SURFACE PLASMON OF THIN GOLD FILM WITH PERIODIC ARRAYS OF NANOHOLES

Modern Physics Letters B ◽

10.1142/s0217984909017960 ◽

2009 ◽

Vol 23 (02) ◽

pp. 147-153 ◽

Cited By ~ 1

Author(s):

ZONG-SUO ZHANG ◽

XIONG-RUI SU ◽

JIAN-BO LI ◽

ZHONG-HUA HAO ◽

LI ZHOU

Keyword(s):

Surface Plasmon ◽

Gold Film ◽

Dipole Approximation ◽

Resonance Peak ◽

Localized Surface Plasmon ◽

Gold Films ◽

Thin Gold Film ◽

Periodic Arrays ◽

Edge Separation ◽

Plasmon Polaritons

The localized surface plasmon (LSP) resonances properties of periodic arrays of nanoholes in thin gold films are investigated by using the method of discrete dipole approximation (DDA). The surface plasmon polaritons (SPPs) play important roles in amplification or suppression of the LSP resonances in the film. The LSP-SPP coupling is affirmed based on the extinction spectra calculated by the DDA. The intensity of the LSP resonances can be controlled through changing the edge-to-edge separation distances between nanoholes, the number and the diameter of the nanoholes. The calculations also indicate that the LSP resonance peak decreases with increasing the thickness of the gold film.

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