Tip-induced local anodic oxidation on the nativeSiO2layer of Si(111) using an atomic force microscope

2001 ◽  
Vol 64 (19) ◽  
Author(s):  
Y.-R. Ma ◽  
C. Yu ◽  
Y.-D. Yao ◽  
Y. Liou ◽  
S.-F. Lee
Keyword(s):  
Atomic Force Microscope ◽  
Anodic Oxidation ◽  
Atomic Force ◽  
Local Anodic Oxidation

Local anodic oxidation of superconducting NbN thin films by an atomic force microscope

2009 ◽  
Vol 22 (12) ◽  
pp. 125027 ◽  
Author(s):  
X Y Yang ◽  
L X You ◽  
X Wang ◽  
L B Zhang ◽  
L Kang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Force Microscope ◽  
Anodic Oxidation ◽  
Atomic Force ◽  
Local Anodic Oxidation

scholarly journals Fabrication of graphene nanoribbon by local anodic oxidation lithography using atomic force microscope

2009 ◽  
Vol 94 (8) ◽  
pp. 082107 ◽  
Author(s):  
S. Masubuchi ◽  
M. Ono ◽  
K. Yoshida ◽  
K. Hirakawa ◽  
T. Machida
Keyword(s):  
Atomic Force Microscope ◽  
Anodic Oxidation ◽  
Graphene Nanoribbon ◽  
Atomic Force ◽  
Local Anodic Oxidation

scholarly journals The initial stages of atomic force microscope based local anodic oxidation of silicon

AIP Advances ◽  
2018 ◽  
Vol 8 (2) ◽  
pp. 025113
Author(s):  
A. S. Kozhukhov ◽  
D. V. Scheglov ◽  
L. I. Fedina ◽  
A. V. Latyshev
Keyword(s):  
Atomic Force Microscope ◽  
Anodic Oxidation ◽  
Atomic Force ◽  
Local Anodic Oxidation

scholarly journals Локальное анодное окисление слоев графена на SiC

2018 ◽  
Vol 44 (9) ◽  
pp. 34
Author(s):  
П.А. Алексеев ◽  
Б.Р. Бородин ◽  
М.С. Дунаевский ◽  
А.Н. Смирнов ◽  
В.Ю. Давыдов ◽  
...  
Keyword(s):  
Experimental Data ◽  
Raman Spectroscopy ◽  
Anodic Oxidation ◽  
Scanning Velocity ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Anodic Oxidation ◽  
Probe Voltage ◽  
20 Nm ◽  
Oxidation Parameters

AbstractA method of local anodic oxidation has been used to obtain graphene-oxide regions on SiC. The change of the surface properties was confirmed by atomic-force microscopy and Raman spectroscopy. Experimental data were obtained on the conductivity, potential, and topography of the oxidized regions. It was shown that the oxidation leads to a rise in the surface potential. A relationship was found between oxidation parameters, such as the scanning velocity and the probe voltage. The method of local anodic oxidation was used to obtain by lithography an ~20-nm-wide nanoribbon and an ~10-nm-wide nanoconstriction.

Local anodic oxidation by atomic force microscopy for nano-Raman strain measurements on silicon–germanium thin films

2010 ◽  
Vol 518 (12) ◽  
pp. 3267-3272 ◽  
Author(s):  
Krzysztof Kolanek ◽  
Peter Hermann ◽  
Piotr T. Dudek ◽  
Teodor Gotszalk ◽  
Dmytro Chumakov ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Force Microscopy ◽  
Anodic Oxidation ◽  
Silicon Germanium ◽  
Strain Measurements ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Anodic Oxidation
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