Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode
1992 ◽
Vol 68
(1)
◽
pp. 40-43
◽
1984 ◽
Vol 17
(8)
◽
pp. 1647-1656
◽
1992 ◽
Vol 112
(12)
◽
pp. 1015-1019
1992 ◽
Vol 31
(Part 1, No. 5A)
◽
pp. 1503-1504
◽
1977 ◽
Vol 27
(9)
◽
pp. 1027-1033
◽
1985 ◽
Vol 18
(3)
◽
pp. 347-358
◽
2003 ◽
Vol 42
(Part 1, No. 2A)
◽
pp. 657-662
◽
1987 ◽
Vol 20
(7)
◽
pp. 838-843
◽