Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode

1992 ◽  
Vol 68 (1) ◽  
pp. 40-43 ◽  
Author(s):  
V. A. Godyak ◽  
R. B. Piejak ◽  
B. M. Alexandrovich
2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino

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