Measurement of Electron Energy Distribution Function in a Low-Pressure rf Discharge Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.1503 ◽

1992 ◽

Vol 31 (Part 1, No. 5A) ◽

pp. 1503-1504 ◽

Author(s):

Shinya Yagura ◽

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Low Pressure ◽

Energy Distribution Function ◽

Rf Discharge ◽

Electron Energy Distribution

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Measurements on the electron-energy distribution function in a low-pressure cesium discharge

Physica ◽

10.1016/0031-8914(72)90050-x ◽

1972 ◽

Vol 57 (4) ◽

pp. 624-627 ◽

Author(s):

A.J. Postma ◽

K. Wiesemann

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Electron energy distribution function in low-pressure complex plasmas

Journal of Plasma Physics ◽

10.1017/s002237780400354x ◽

2005 ◽

Vol 71 (2) ◽

pp. 217-224 ◽

Author(s):

K. OSTRIKOV ◽

I. DENYSENKO ◽

M. Y. YU ◽

S. XU

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Complex Plasmas

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Influence of diffusion of the electron energy distribution function in a low-temperature microwave discharge plasma

Radiophysics and Quantum Electronics ◽

10.1007/bf01039676 ◽

1989 ◽

Vol 32 (2) ◽

pp. 184-189

Author(s):

N. A. Dyatko ◽

I. V. Kochetov ◽

A. P. Napartovich

Keyword(s):

Distribution Function ◽

Low Temperature ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Microwave Discharge ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Measurements of electron energy distribution function in an asymmetric radio‐frequency discharge plasma

Journal of Applied Physics ◽

10.1063/1.353193 ◽

1993 ◽

Vol 73 (4) ◽

pp. 1612-1616 ◽

Author(s):

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Chihiro Komatsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Discharge

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Measurements on the electron-energy distribution function in a low-pressure cesium discharge

Physica ◽

10.1016/0031-8914(70)90200-4 ◽

1970 ◽

Vol 49 (1) ◽

pp. 77-91 ◽

Author(s):

A.J. Postma

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

Physics of Plasmas ◽

10.1063/1.4967356 ◽

2016 ◽

Vol 23 (11) ◽

pp. 110701 ◽

Author(s):

S. Sharma ◽

N. Sirse ◽

P. K. Kaw ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Driving Frequency ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMA

Acta Physica Sinica ◽

10.7498/aps.38.236 ◽

1989 ◽

Vol 38 (2) ◽

pp. 236

Author(s):

ZHU WEN-HAO ◽

ZHU NAN-QIANG ◽

CHEN YUE-SHAN

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Rf Plasma ◽

Electron Energy Distribution ◽

Probe Diagnostics

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Electron Energy Distribution Function measurements in a low pressure expanding plasma jet

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6633366 ◽

2013 ◽

Author(s):

Rodrigo S. Pessoa ◽

David Toneli ◽

Marisa Roberto ◽

Gilberto Petraconi ◽

Homero Santiago Maciel

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution

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On the Question of Increasing Maxwellization of the Electron Energy Distribution Function due to Electron — Electron Interaction with Growing Ionization Degree in the Beam Discharge Plasma

Beiträge aus der Plasmaphysik ◽

10.1002/ctpp.19830230303 ◽

1983 ◽

Vol 23 (3) ◽

pp. 219-228 ◽

Author(s):

R. Winkler ◽

J. Wilhelm

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Interaction ◽

Electron Energy Distribution ◽

Ionization Degree

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Low-Pressure PECVD of Nanoparticles in Carbon Thin Films from Ar/H2/C2H2 Plasmas: Synthesis of Films and Analysis of the Electron Energy Distribution Function

Chemical Vapor Deposition ◽

10.1002/cvde.200606554 ◽

2007 ◽

Vol 13 (6-7) ◽

pp. 326-334 ◽

Author(s):

M. Camero ◽

F. J. Gordillo-Vázquez ◽

C. Gómez-Aleixandre

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Carbon Thin Films

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