Measurements of Electron Energy Distribution Function in RF Discharge Plasmas by Using Improved Driven Probe Method
1992 ◽
Vol 112
(12)
◽
pp. 1015-1019
2012 ◽
Vol 21
(2)
◽
pp. 025004
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1992 ◽
Vol 31
(Part 1, No. 5A)
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pp. 1503-1504
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1992 ◽
Vol 68
(1)
◽
pp. 40-43
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2008 ◽
Vol 113
◽
pp. 012004
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1977 ◽
Vol 27
(9)
◽
pp. 1027-1033
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1985 ◽
Vol 18
(3)
◽
pp. 347-358
◽
2003 ◽
Vol 42
(Part 1, No. 2A)
◽
pp. 657-662
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