scholarly journals Measurements of Electron Energy Distribution Function in RF Discharge Plasmas by Using Improved Driven Probe Method

1992 ◽  
Vol 112 (12) ◽  
pp. 1015-1019
Author(s):  
Atsushi Ohsawa ◽  
Mikio Ohuchi ◽  
Tadahiro Kubota
2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino

Sign in / Sign up

Export Citation Format

Share Document