Charge generation by heavy ions in power MOSFETs, burnout space predictions and dynamic SEB sensitivity

1992 ◽  
Vol 39 (6) ◽  
pp. 1704-1711 ◽  
Author(s):  
E.G. Stassinopoulos ◽  
G.J. Brucker ◽  
P. Calvel ◽  
A. Baiget ◽  
C. Peyrotte ◽  
...  
Author(s):  
G. BUSATTO ◽  
F. IANNUZZO ◽  
A. PORZIO ◽  
A. SANSEVERINO ◽  
F. VELARDI ◽  
...  
Keyword(s):  

1994 ◽  
Vol 41 (6) ◽  
pp. 2210-2215 ◽  
Author(s):  
S. Kuboyama ◽  
S. Matsuda ◽  
T. Kanno ◽  
T. Hirose

2008 ◽  
Vol 55 (4) ◽  
pp. 2166-2173 ◽  
Author(s):  
Aurore Luu ◽  
Florent Miller ◽  
Patrick Poirot ◽  
RÉmi Gaillard ◽  
Nadine Buard ◽  
...  
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1992 ◽  
Vol 39 (3) ◽  
pp. 357-361 ◽  
Author(s):  
P. Tastet ◽  
J. Garnier
Keyword(s):  

2012 ◽  
Vol 52 (9-10) ◽  
pp. 2363-2367 ◽  
Author(s):  
G. Busatto ◽  
V. De Luca ◽  
F. Iannuzzo ◽  
A. Sanseverino ◽  
F. Velardi
Keyword(s):  

Author(s):  
K. F. Russell ◽  
L. L. Horton

Beams of heavy ions from particle accelerators are used to produce radiation damage in metal alloys. The damaged layer extends several microns below the surface of the specimen with the maximum damage and depth dependent upon the energy of the ions, type of ions, and target material. Using 4 MeV heavy ions from a Van de Graaff accelerator causes peak damage approximately 1 μm below the specimen surface. To study this area, it is necessary to remove a thickness of approximately 1 μm of damaged metal from the surface (referred to as “sectioning“) and to electropolish this region to electron transparency from the unirradiated surface (referred to as “backthinning“). We have developed electropolishing techniques to obtain electron transparent regions at any depth below the surface of a standard TEM disk. These techniques may be applied wherever TEM information is needed at a specific subsurface position.


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