Nonlinear dynamics of radio frequency plasma processing reactors powered by multifrequency sources

1999 ◽  
Vol 27 (5) ◽  
pp. 1329-1338 ◽  
Author(s):  
S. Rauf ◽  
M.J. Kushner
Keyword(s):  
Nonlinear Dynamics ◽  
Radio Frequency ◽  
Plasma Processing ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Plasma Processing Reactors

Hydrogen/oxygen radio-frequency plasma processing of LiNbO3

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Jiri Vacik ◽  
Jarmila Cervena ◽  
Vladimir Zelezny
Keyword(s):  
Radio Frequency ◽  
Plasma Processing ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

scholarly journals Radio frequency plasma processing effects on the emission characteristics of a MeV electron beam cathode

1999 ◽  
Vol 75 (1) ◽  
pp. 31-33 ◽  
Author(s):  
J. I. Rintamaki ◽  
R. M. Gilgenbach ◽  
W. E. Cohen ◽  
R. L. Jaynes ◽  
M. E. Cuneo ◽  
...  
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Radio Frequency ◽  
Plasma Processing ◽  
Emission Characteristics ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Processing Effects

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Vol 108 (15) ◽  
pp. 4640-4646 ◽  
Author(s):  
Masafumi Ata ◽  
Houjin Huang ◽  
Takeshi Akasaka
Keyword(s):  
Radio Frequency ◽  
Plasma Processing ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Radio frequency plasma processing to produce chromium sputter targets

2000 ◽  
Vol 9 (4) ◽  
pp. 488-493 ◽  
Author(s):  
M. Müller ◽  
R. B. Heimann ◽  
F. Gitzhofer ◽  
M. I. Boulos ◽  
K. Schwarz
Keyword(s):  
Radio Frequency ◽  
Plasma Processing ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Desulfurization of thiophenes by radio-frequency plasma processing

1981 ◽  
Vol 1 (2) ◽  
pp. 179-189 ◽  
Author(s):  
Harald Suhr ◽  
Hermann Schmid ◽  
Heinz-Gerd Walter
Keyword(s):  
Radio Frequency ◽  
Plasma Processing ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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