Dually driven radio frequency plasma simulation with a three moment model
1998 ◽
Vol 16
(4)
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pp. 2162-2172
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2021 ◽
Vol 1923
(1)
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pp. 012020
2013 ◽
Vol 84
(6)
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pp. 063904
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Keyword(s):
1994 ◽
Vol 138
(1-4)
◽
pp. 443-447
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Keyword(s):
2011 ◽
Vol 20
(3)
◽
pp. 034020
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2014 ◽
Vol 85
(2)
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pp. 02B117
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Keyword(s):