ABSTRACTThis paper reports the development of flexible, neural electrode arrays made from liquid crystal polymer (LCP) and a polynorbornene (PNB) known by its trade name AvatrelTM. Each array consists of a single flexible, polymeric structure composed of an 8 mm-wide pad supporting eight Pt contacts connected to an ASIC mounting pad by a 5 cm-long, 2 mm-wide shaft carrying eight, 50 μm-wide Pt interconnect lines. The Pt conductors sit atop a 50 μm-thick base layer and are isolated from the environment except at the contacts by a capping layer of the same material as the base. In both cases, the devices were fabricated using conventional microfabrication techniques adapted for the particular polymeric material. In the case of LCP, the base structure was fabricated on 50 μm-thick sheets that were laminated and etched into the final structure. In contrast to LCP, PNB is spin castable and photodefinable, which enabled conventional photolithographic patterning techniques to be employed in a straightforward manner. The PNB-based devices could readily be fabricated, however issues related to LCP etching necessitated the development of a multi-step etch process to form the vias that expose the contacts. Electrodes made from both polymers could support electrical loads typical of stimulation applications without failing. A simple cell culture test suggests that Avatrel™ may be biocompatible, at least for short term applications.
Parallel, minimally-invasive implantation of ultra-flexible neural electrode arrays
