Plasma Enhanced Atomic Layer Deposition of Iridium Oxide for Application in Miniaturized Neural Implants

High quality recording of neuronal activities and electrical stimulation require neurotechnical implants with appropriate electrode material. Iridium oxide (IrOx) is an excellent choice of material due to its biocompatibility, low electrochemical impedance, superior charge injection capacity, corrosion resistance, longevity, and electrochemical stability. Plasma enhanced atomic layer deposition (PE-ALD) and a suitable precursor, like (Methylcyclopentadienyl) (1,5- cyclooctadiene) iridium, could be a promising technique to produce highly conformal and performant IrOx-films at low temperatures and low costs. Various studies have reported the deposition of iridium oxide, but usually at very high temperatures. These processes are not suitable for polymer substrates and limit the use of such post-processing together with active implants. In this work the (Methylcyclopentadienyl) (1,5-cyclooctadiene) iridium(I) ((MeCp)Ir(COD)) precursor was used as a promising approach for depositing IrOx-films using low temperature PE-ALD. This precursor is normally used for chemical vapour deposition processes. First experiments were carried out on silicon substrates at deposition temperatures of 110 C°. The precursor was heated up to 75 °C and oxygen plasma was used as coreactant. The deposited films were analysed with EDX and AFM, showing a smooth surface and a promising ratio between the elements iridium and oxygen.

Iridium Oxide Enabled Sensors Applications

There have been numerous studies applying iridium oxides in different applications to explore their proton-change-based reactions since the 1980s. Iridium oxide can be fabricated directly by applying electrodeposition, sputter-coating method, or oxidation of iridium wire. Generally, there have been currently two approaches in applying iridium oxide to enable its sensing applications. One was to improve or create different electrolytes with (non-)electrodeposition method for better performance of Nernst Constant with the temperature-related system. The mechanism behind the scenes were summarized herein. The other was to change the structure of iridium oxide through different kinds of templates such as photolithography patterns, or template-assisted direct growth methods, etc. to improve the sensing performance. The detection targets varied widely from intracellular cell pH, glucose in an artificial sample or actual urine sample, and the hydrogen peroxide, glutamate or organophosphate pesticides, metal-ions, etc. This review paper has focused on the mechanism of electrodeposition of iridium oxide in aqueous conditions and the sensing applications towards different biomolecules compounds. Finally, we summarize future trends on Iridium oxide based sensing and predict future work that could be further explored.