Zero temperature coefficient of frequency in extensional-mode highly doped silicon microresonators

2012 IEEE International Frequency Control Symposium Proceedings ◽

10.1109/fcs.2012.6243640 ◽

2012 ◽

Author(s):

Mohsen Shahmohammadi ◽

Brandon P. Harrington ◽

Reza Abdolvand

Keyword(s):

Temperature Coefficient ◽

Zero Temperature ◽

Doped Silicon ◽

Temperature Coefficient Of Frequency

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Zero Temperature Coefficient of Frequency Surface Acoustic Wave Resonator for Narrow-Duplex-Gap Application on SiO2/Al/LiNbO3Structure

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.07hd13 ◽

2011 ◽

Vol 50 (7) ◽

pp. 07HD13 ◽

Author(s):

Hidekazu Nakanishi ◽

Hiroyuki Nakamura ◽

Tetsuya Tsurunari ◽

Joji Fujiwara ◽

Yosuke Hamaoka ◽

...

Keyword(s):

Acoustic Wave ◽

Temperature Coefficient ◽

Surface Acoustic Wave ◽

Zero Temperature ◽

Wave Resonator ◽

Temperature Coefficient Of Frequency

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The Growth of Lithium Tantalite, a Wide Band, Low Impedance and Zero Temperature Coefficient of Frequency Piezoelectric

10.1109/freq.1972.199896 ◽

1972 ◽

Author(s):

D.W. Rudd ◽

A.A. Ballman

Keyword(s):

Temperature Coefficient ◽

Wide Band ◽

Zero Temperature ◽

Temperature Coefficient Of Frequency

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Transverse-Mode Spurious Suppression Technique for Surface Acoustic Wave Resonator with Zero Temperature Coefficient of Frequency on a SiO$_{2}$/Al/LiNbO$_{3}$ Structure

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.07gc15 ◽

2012 ◽

Vol 51 ◽

pp. 07GC15 ◽

Author(s):

Hidekazu Nakanishi ◽

Hiroyuki Nakamura ◽

Tetsuya Tsurunari ◽

Joji Fujiwara ◽

Yosuke Hamaoka ◽

...

Keyword(s):

Acoustic Wave ◽

Temperature Coefficient ◽

Surface Acoustic Wave ◽

Transverse Mode ◽

Zero Temperature ◽

Wave Resonator ◽

Suppression Technique ◽

Spurious Suppression ◽

Temperature Coefficient Of Frequency

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Transverse-Mode Spurious Suppression Technique for Surface Acoustic Wave Resonator with Zero Temperature Coefficient of Frequency on a SiO2/Al/LiNbO3Structure

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.07gc15 ◽

2012 ◽

Vol 51 (7S) ◽

pp. 07GC15 ◽

Author(s):

Hidekazu Nakanishi ◽

Hiroyuki Nakamura ◽

Tetsuya Tsurunari ◽

Joji Fujiwara ◽

Yosuke Hamaoka ◽

...

Keyword(s):

Acoustic Wave ◽

Temperature Coefficient ◽

Surface Acoustic Wave ◽

Transverse Mode ◽

Zero Temperature ◽

Wave Resonator ◽

Suppression Technique ◽

Spurious Suppression ◽

Temperature Coefficient Of Frequency

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Dependence of temperature coefficient of frequency (TCf) on crystallography and eigenmode in N-doped silicon contour mode micromechanical resonators

Sensors and Actuators A Physical ◽

10.1016/j.sna.2014.04.001 ◽

2014 ◽

Vol 215 ◽

pp. 189-196 ◽

Author(s):

Haoshen Zhu ◽

Cheng Tu ◽

Guangcun Shan ◽

Joshua E.-Y. Lee

Keyword(s):

Temperature Coefficient ◽

Micromechanical Resonators ◽

Doped Silicon ◽

Temperature Coefficient Of Frequency ◽

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Investigation of SiO2 film properties for zero temperature coefficient of frequency SAW devices

2010 IEEE International Ultrasonics Symposium ◽

10.1109/ultsym.2010.5935494 ◽

2010 ◽

Author(s):

S. Matsuda ◽

M. Miura ◽

T. Matsuda ◽

M. Ueda ◽

Y. Satoh ◽

...

Keyword(s):

Temperature Coefficient ◽

Zero Temperature ◽

Film Properties ◽

Saw Devices ◽

Temperature Coefficient Of Frequency

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Piezo-electric Resonator of Ethylene Diamine Tartrate with Zero Temperature Coefficient of Frequency

Nature ◽

10.1038/164190b0 ◽

1949 ◽

Vol 164 (4161) ◽

pp. 190-191 ◽

Author(s):

R. BECHMANN

Keyword(s):

Temperature Coefficient ◽

Ethylene Diamine ◽

Zero Temperature ◽

Temperature Coefficient Of Frequency ◽

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Zero temperature coefficient of frequency crystal cuts in monoclinic NdCa4O(BO3)3 piezoelectric crystals

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.201004188 ◽

2010 ◽

Vol 4 (8-9) ◽

pp. 185-187 ◽

Author(s):

Fapeng Yu ◽

Shujun Zhang ◽

Xian Zhao ◽

Duorong Yuan ◽

Qing-Ming Wang ◽

...

Keyword(s):

Temperature Coefficient ◽

Zero Temperature ◽

Piezoelectric Crystals ◽

Temperature Coefficient Of Frequency

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Temperature compensated bulk acoustic wave resonator (BAWR) for near zero temperature coefficient of frequency (TCF)

2012 42nd European Microwave Conference ◽

10.23919/eumc.2012.6459302 ◽

2012 ◽

Author(s):

Sang Uk Son ◽

Insang Song ◽

Jeashik Shin ◽

Ho-Soo Park ◽

Jing Cui ◽

...

Keyword(s):

Acoustic Wave ◽

Temperature Coefficient ◽

Bulk Acoustic Wave ◽

Zero Temperature ◽

Bulk Acoustic Wave Resonator ◽

Wave Resonator ◽

Temperature Coefficient Of Frequency

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Suppression of transverse-mode spurious responses for zero temperature coefficient of frequency SAW resonator on a SiO2/Al/LiNbO3 structure

2011 IEEE International Ultrasonics Symposium ◽

10.1109/ultsym.2011.0019 ◽

2011 ◽

Author(s):

H. Nakanishi ◽

H. Nakamura ◽

T. Tsurunari ◽

J. Fujiwara ◽

Y. Hamaoka ◽

...

Keyword(s):

Temperature Coefficient ◽

Transverse Mode ◽

Zero Temperature ◽

Temperature Coefficient Of Frequency

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