Investigation of SiO2 film properties for zero temperature coefficient of frequency SAW devices

2010 ◽  
Author(s):  
S. Matsuda ◽  
M. Miura ◽  
T. Matsuda ◽  
M. Ueda ◽  
Y. Satoh ◽  
...  
Keyword(s):  
Temperature Coefficient ◽  
Zero Temperature ◽  
Film Properties ◽  
Saw Devices ◽  
Temperature Coefficient Of Frequency

Zero Temperature Coefficient of Frequency Surface Acoustic Wave Resonator for Narrow-Duplex-Gap Application on SiO2/Al/LiNbO3Structure

2011 ◽  
Vol 50 (7) ◽  
pp. 07HD13 ◽  
Author(s):  
Hidekazu Nakanishi ◽  
Hiroyuki Nakamura ◽  
Tetsuya Tsurunari ◽  
Joji Fujiwara ◽  
Yosuke Hamaoka ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Temperature Coefficient ◽  
Surface Acoustic Wave ◽  
Zero Temperature ◽  
Wave Resonator ◽  
Temperature Coefficient Of Frequency
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