The role of channel height and actuation method on particle manipulation in surface acoustic wave (SAW)-driven microfluidic devices

Surface acoustic wave (SAW) micromanipulation offers modularity, easy integration into microfluidic devices and a high degree of flexibility. A major challenge for acoustic manipulation, however, is the existence of a lower limit on the minimum particle size that can be manipulated. As particle size reduces, the drag force resulting from acoustic streaming dominates over acoustic radiation forces; reducing this threshold is key to manipulating smaller specimens. To address this, we investigate a novel excitation configuration based on diffractive-acoustic SAW (DASAW) actuation and demonstrate a reduction in the critical minimum particle size which can be manipulated. DASAW exploits the inherent diffractive effects arising from a limited transducer area in a microchannel, requiring only a travelling SAW (TSAW) to generate time-averaged pressure gradients. We show that these acoustic fields focus particles at the channel walls, and further compare this excitation mode with more typical standing SAW (SSAW) actuation. Compared to SSAW, DASAW reduces acoustic streaming effects whilst generating a comparable pressure field. The result of these factors is a critical particle size with DASAW (1 $$\upmu$$ μ m) that is significantly smaller than that for SSAW actuation (1.85 $$\upmu$$ μ m), for polystyrene particles and a given $$\lambda _{\text {SAW}}$$ λ SAW = 200 $$\upmu$$ μ m. We further find that streaming magnitude can be tuned in a DASAW system by changing the channel height, noting optimum channel heights for particle collection as a function of the fluid wavelength at which streaming velocities are minimised in both DASAW and SSAW devices.

Development of ball surface acoustic wave gas chromatograph for environmental monitoring in spacecraft and its application on the ground

For on-site analysis of surface materials on the moon, planets, and small bodies and for the monitoring of air quality in crewed spacecraft, we have developed a portable gas chromatograph (GC) equipped with a ball surface acoustic wave (SAW) sensor. In this study, we fabricated a 10 cm cube GC that implements the forward flush method using two metal micro-electro-mechanical-system (MEMS) columns coated with different stationary phases in microchannels fabricated by wet etching and diffusion bonding of stainless-steel plates. Using this GC, we succeeded in analyzing 10 kinds of gas within 10 min. In addition, for the application of the ball SAW GC on the ground, we also developed a palm-sized GC with a single metal capillary column and used it in the analysis of the headspace gas of sake. We showed that the ratio of peak areas differed among odorants depending on the brand and brewing process of sake.

c-Axis-tilted ScAlN films grown on silicon substrates for surface acoustic wave devices

ScAlN films are currently being investigated for their potential use in surface acoustic wave (SAW) devices for next-generation mobile networks because of their high piezoelectricity. This paper describes the numerical simulation of SAW propagation in c-axis-tilted ScAlN films on silicon substrates and a fabrication technique for preparing c-axis-tilted ScAlN films on silicon substrates. The electromechanical coupling coefficient K 2 of SAW propagating in the ScAlN film/silicon substrate increased due to the c-axis tilt angle. The maximum K 2 value is approximately 3.90%. This value is 2.6 times the maximum K 2 value of the c-axis-oriented ScAlN film/silicon substrate structure. The c-axis-tilted ScAlN films with an Sc concentration of 40% were prepared on a silicon substrate via RF magnetron sputtering based on the self-shadowing effect, and the maximum c-axis tilt angle was 57.4°. These results indicate that this device structure has potential for SAW device applications with well-established micromachining technology derived from silicon substrates.

Peculiarities of the Acoustic Wave Propagation in Diamond-Based Multilayer Piezoelectric Structures as “Me1/(Al,Sc)N/Me2/(100) Diamond/Me3” and “Me1/AlN/Me2/(100) Diamond/Me3” under Metal Thin-Film Deposition

New theoretical and experimental results of microwave acoustic wave propagation in diamond-based multilayer piezoelectric structures (MPS) as “Me1/(Al,Sc)N/Me2/(100) diamond/Me3” and “Me1/AlN/Me2/(100) diamond/Me3” under three metal film depositions, including the change in the quality factor Q as a result of Me3 impact, were obtained. Further development of our earlier studies was motivated by the necessity of creating a sensor model based on the above fifth layered MPS and its in-depth study using the finite element method (FEM). Experimental results on the change in operational checkpoint frequencies and quality factors under the effect of film deposition are in satisfactory accordance with FEM data. The relatively small decrease in the quality factor of diamond-based high overtone bulk acoustic resonator (HBAR) under the metal layer effect observed in a wide microwave band could be qualified as an important result. Changes in operational resonant frequencies vs. film thickness were found to have sufficient distinctions. This fact can be quite explained in terms of the difference between acoustic impedances of diamond and deposited metal films.