Development of a high-speed, phase-sensitive laser probe system for RF surface/bulk acoustic wave devices with an autofocus function for long time continuous operation

This paper describes the implementation of the autofocus function for the laser beam into the high-speed, phase-sensitive laser probe system for RF SAW/BAW devices. This implementation can compensate defocus caused during continuous measurements that take dozens of hours. After a brief explanation of the system used in this work, detailed discussion is given on an employed evaluation function indicating focus status, which is a key factor determining autofocus reliability. It is shown that the sum of energy of Laplacians is suitable as the evaluation function, which can be calculated by the image of the probing laser spot captured by a build-in CCD camera. Then, the implementation of the autofocus function into the current system is detailed. It is confirmed that this function can adjust the focus within almost ±20 μm defocus conditions. Finally, it is confirmed how the implemented autofocus function works effectively to keep just-in-focus under the disturbance.

Evaluation of the Impact of Abnormal Grains on the Performance of Sc0.15Al0.85N-based BAW Resonators and Filters

ScxAl1-xN is a promising piezoelectric material for radio frequency communication applications with excellent electro-acoustic properties. However, the growth of abnormally oriented grains is widely observed in the Sc doped AlN films deposited by sputtering. In this work, for the first time, the impact of the abnormal grains in the Sc0.15Al0.85N films on the performance of bulk acoustic wave resonators and filters is systematically evaluated by both simulations and measurements. The correlation between the device performance and the abnormal grain parameters, including the density, dimension, crystal orientation, growth height, and the total volume of the abnormal grains, is evaluated and quantified. Simulation results show that the total volume of all abnormal grains in the whole device is the most critical factor among the parameters. Abnormal grains with randomly distributed parameters and around 6% total volume of the film can degrade the effective coupling coefficient of the resonator from 13.6% to 11%, leading to a 10.6% decrement of the filter bandwidth. Wafer-level device characterizations and measurements are performed, and the results are consistent with the simulations. This study provides a practical method for predicting the performance of the resonators and filters with abnormal grains, and a guideline for film quality evaluation.

Wideband double-mode bulk acoustic wave resonator filters on lithium niobate using periodically slotted electrodes

Abstract: This paper discusses applicability of periodically slotted electrodes for realization of wideband transversely-coupled double-mode resonator filters using lithium niobate (LN) thin plate. First, two-dimensional analysis is carried out, and it is shown that the periodic structure is effective to control the frequency separation between two resonance modes, and synthesis of the fractional bandwidth larger than 24% is achievable. Next, 3D analysis is performed for suppression of spurious resonances. It is shown that the mass loading at aperture edges is effective for the piston mode operation, and transverse modes can be well suppressed. It is also pointed out that the bottom electrode should be covered only the aperture region and removed from the busbar and gap regions for suppression of unwanted resonances. With these proper edge treatments, spurious-free and wide passband can be synthesized.

Recent Advances in Fabricating Wurtzite AlN Film on (0001)-Plane Sapphire Substrate

Ultrawide bandgap (UWBG) semiconductor materials, with bandgaps far wider than the 3.4 eV of GaN, have attracted great attention recently. As a typical representative, wurtzite aluminum nitride (AlN) material has many advantages including high electron mobility, high breakdown voltage, high piezoelectric coefficient, high thermal conductivity, high hardness, high corrosion resistance, high chemical and thermal stability, high bulk acoustic wave velocity, prominent second-order optical nonlinearity, as well as excellent UV transparency. Therefore, it has wide application prospects in next-generation power electronic devices, energy-harvesting devices, acoustic devices, optical frequency comb, light-emitting diodes, photodetectors, and laser diodes. Due to the lack of low-cost, large-size, and high-ultraviolet-transparency native AlN substrate, however, heteroepitaxial AlN film grown on sapphire substrate is usually adopted to fabricate various devices. To realize high-performance AlN-based devices, we must first know how to obtain high-crystalline-quality and controllable AlN/sapphire templates. This review systematically summarizes the recent advances in fabricating wurtzite AlN film on (0001)-plane sapphire substrate. First, we discuss the control principles of AlN polarity, which greatly affects the surface morphology and crystalline quality of AlN, as well as the electronic and optoelectronic properties of AlN-based devices. Then, we introduce how to control threading dislocations and strain. The physical thoughts of some inspirational growth techniques are discussed in detail, and the threading dislocation density (TDD) values of AlN/sapphire grown by various growth techniques are compiled. We also introduce how to achieve high thermal conductivities in AlN films, which are comparable with those in bulk AlN. Finally, we summarize the future challenge of AlN films acting as templates and semiconductors. Due to the fast development of growth techniques and equipment, as well as the superior material properties, AlN will have wider industrial applications in the future.

Acoustic Biosensors and Microfluidic Devices in the Decennium: Principles and Applications

Lab-on-a-chip (LOC) technology has gained primary attention in the past decade, where label-free biosensors and microfluidic actuation platforms are integrated to realize such LOC devices. Among the multitude of technologies that enables the successful integration of these two features, the piezoelectric acoustic wave method is best suited for handling biological samples due to biocompatibility, label-free and non-invasive properties. In this review paper, we present a study on the use of acoustic waves generated by piezoelectric materials in the area of label-free biosensors and microfluidic actuation towards the realization of LOC and POC devices. The categorization of acoustic wave technology into the bulk acoustic wave and surface acoustic wave has been considered with the inclusion of biological sample sensing and manipulation applications. This paper presents an approach with a comprehensive study on the fundamental operating principles of acoustic waves in biosensing and microfluidic actuation, acoustic wave modes suitable for sensing and actuation, piezoelectric materials used for acoustic wave generation, fabrication methods, and challenges in the use of acoustic wave modes in biosensing. Recent developments in the past decade, in various sensing potentialities of acoustic waves in a myriad of applications, including sensing of proteins, disease biomarkers, DNA, pathogenic microorganisms, acoustofluidic manipulation, and the sorting of biological samples such as cells, have been given primary focus. An insight into the future perspectives of real-time, label-free, and portable LOC devices utilizing acoustic waves is also presented. The developments in the field of thin-film piezoelectric materials, with the possibility of integrating sensing and actuation on a single platform utilizing the reversible property of smart piezoelectric materials, provide a step forward in the realization of monolithic integrated LOC and POC devices. Finally, the present paper highlights the key benefits and challenges in terms of commercialization, in the field of acoustic wave-based biosensors and actuation platforms.