Electrical Properties of Carbon Nanotube Via Interconnects Fabricated by Novel Damascene Process

Author(s):  
Mizuhisa Nihei ◽  
Takashi Hyakushima ◽  
Shintaro Sato ◽  
Tatsuhiro Nozue ◽  
Masaaki Norimatsu ◽  
...  
Author(s):  
Masahisa Fujino ◽  
Hidenori Terasaka ◽  
Tadatomo Suga ◽  
Ikuo Soga ◽  
Daiyu Kondo ◽  
...  

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